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High Resolution Position Monitoring of Suspended MEMS towards Biological and Chemical Sensors

Published online by Cambridge University Press:  22 January 2014

G. Putrino ,
M. Martyniuk ,
A. Keating ,
J.M. Dell  and
L. Faraone
G. Putrino
Affiliation:
School of Electrical, Electronic and Computer Engineering, The University of Western Australia, 35 Stirling Hwy, Crawley, WA 6009, Australia
M. Martyniuk
Affiliation:
School of Electrical, Electronic and Computer Engineering, The University of Western Australia, 35 Stirling Hwy, Crawley, WA 6009, Australia
A. Keating
Affiliation:
School of Mechanical and Chemical Engineering, The University of Western Australia, 35 Stirling Hwy, Crawley, WA 6009, Australia
J.M. Dell
Affiliation:
School of Electrical, Electronic and Computer Engineering, The University of Western Australia, 35 Stirling Hwy, Crawley, WA 6009, Australia
L. Faraone
Affiliation:
School of Electrical, Electronic and Computer Engineering, The University of Western Australia, 35 Stirling Hwy, Crawley, WA 6009, Australia
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Abstract

We present an integrated readout technique for interrogating the suspension height of micro-electro-mechanical systems (MEMS) structures. This readout technique is envisaged to be useful in applications such as MEMS-based biological and chemical sensing, where it is necessary to obtain the accurate position of a MEMS beam. The approach is based on the suspended MEMS structure modulating light transmission in an underlying optical waveguide via Fabry-Perrot phenomena. The performance of the technique is predicted via finite difference time domain (FDTD) simulations the results of which are confirmed by experimental measurements.

Keywords

microelectro-mechanical (MEMS)microelectronicsoptoelectronic
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1659: Symposium SS/XX – Micro- and Nanoscale Systems – Novel Materials, Structures and Devices , 2014 , pp. 9 - 14
Copyright
Copyright © Materials Research Society 2014 

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References

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