Hostname: page-component-78c5997874-ndw9j Total loading time: 0 Render date: 2024-11-02T21:58:44.329Z Has data issue: false hasContentIssue false

High Resolution Plan View Imaging of Clean and Au Deposited Si(111) Surfaces

Published online by Cambridge University Press:  25 February 2011

S. Ozawa
Affiliation:
Physics Department, TokyoInstitute of Technology, Oh-okayama, Meguro, Tokyo 152, Japan
Y. Tanaka
Affiliation:
Physics Department, TokyoInstitute of Technology, Oh-okayama, Meguro, Tokyo 152, Japan
K. Kobayashi
Affiliation:
Physics Department, TokyoInstitute of Technology, Oh-okayama, Meguro, Tokyo 152, Japan
N. Yamamoto
Affiliation:
Physics Department, TokyoInstitute of Technology, Oh-okayama, Meguro, Tokyo 152, Japan
K. Yagi
Affiliation:
Physics Department, TokyoInstitute of Technology, Oh-okayama, Meguro, Tokyo 152, Japan
Get access

Abstract

High resolution plan view images of clean and Au deposited Si(111) surfaces are presented. Corner holes and small holes between dimers of the DAS model of the 7×7 structure were clearly resolved. In the case of the Si (111) 5×1-Au structure the 5 times period fringes did not show fine details.

Type
Research Article
Copyright
Copyright © Materials Research Society 1991

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Marks, L. D. and Smith, D. J.: Nature 303, 316 (1983).Google Scholar
2. Gibson, J. M.: Phys. Rev. Lett. 53, 1859 (1984).Google Scholar
3. Hasegawa, T., Kobayashi, K., Ikarashi, N., Takayanagi, K. and Yagi, K.: Jpn. J. Appl. Phys. 25, L366 (1986).Google Scholar
4. Hasegawa, T., Ikarashi, N., Kobayashi, K., Takayanagi, K. and Yagi, K.: The Structure of Surfaces (ed. Veen, Van der and Van Hove, M. A., Springer Verlag, Berlin 1987) p4352.Google Scholar
5. Mitome, M. and Takayanagi, K.: Surface Sci. (1991) in press.Google Scholar
6. Ikarashi, N., Kobayashi, K., Koike, H., Hasegawa, T. and Yagi, K.: Ultramicroscopy 26, 195 (1988).Google Scholar
7. Ikarashi, N.: unpublished workGoogle Scholar
8. Woll, Ch., Chiang, S., Wilson, R. and Lippel, P. H.: Phys. Rev. B39, 7988 (1989).Google Scholar
9. Kodaira, Y., Takayanagi, K., Kobayashi, K. and Yagi, K.: Proc. 7th Int. Conf. High Voltage Electron Microscopy (1983 Berkeley) p103106.Google Scholar
10. Takayanagi, K.: J. Microscopy 136, 278 (1984).Google Scholar
11. Hasegawa, T., Takama, K., Hosaka, S. and Hosoki, S.: J. Vac. Sci. Tech. A8, 241 (1990).Google Scholar
12. Yabuuchi, Y., Shoji, F., Oura, K. and Hanawa, T.: Surface Sci. 131, L412 (1983).Google Scholar
13. Koike, H., Kobayashi, K., Ozawa, S. and Yagi, K.: Jpn. J. Appl. Phys. 28, 861 (1989).Google Scholar
14. Ozawa, S., Yamanaka, A., Tanishiro, Y., Kobayashi, K. and Yagi, K.: Jpn. J. Appl. Phys. 29, L655 (1990).Google Scholar
15. Ozawa, S., Kobayashi, K., Tanaka, Y., Koike, H. and Yagi, K.: Proc. 12th Int. Cong. Electron Microscopy (Seattle, 1990) vol. 1, p340341.Google Scholar