Hostname: page-component-586b7cd67f-t8hqh Total loading time: 0 Render date: 2024-11-24T18:03:25.395Z Has data issue: false hasContentIssue false
  • English
  • Français

Growth of CuO and CuGaO2 Thin Films by Spin-coating Method

Published online by Cambridge University Press:  04 April 2011

Afishah Alias ,
Masato Sakamoto  and
Katsuhiro Uesugi
Afishah Alias
Affiliation:
Division of Engineering for Composite Functions, Muroran Institute of Technology, Muroran, Hokkaido 050-8585, Japan
Masato Sakamoto
Affiliation:
Division of Engineering for Composite Functions, Muroran Institute of Technology, Muroran, Hokkaido 050-8585, Japan
Katsuhiro Uesugi
Affiliation:
Division of Engineering for Composite Functions, Muroran Institute of Technology, Muroran, Hokkaido 050-8585, Japan
Get access

Abstract

CuO and CuGaO2 thin films have been grown on Si (100) substrates using a sol-gel spincoating method. CuO films were successfully fabricated by the annealing around 700°C. At higher temperatures (>800°C), pyramidal CuO islands with 1~2μm in width and 0.4~0.8μm in height were observed. They arranged structures as a straight line parallel to the <110> and <010> directions, which suggests the self-organized growth of CuO pyramidal islands. Delafossite CuGaO2 films were fabricated as well, using Cu-Ga-O mixed solutions with Ga/(Cu+Ga) atomic ratio of 0.5. These results indicate that Cu-based compounds were fabricated by the sol-gel spincoating method.

Keywords

crystal growthoxidesol-gel
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1315: Symposium MM – Transparent Conducting Oxides and Applications , 2011 , mrsf10-1315-mm03-07
Copyright
Copyright © Materials Research Society 2011

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1] Banerjee, A.N. and Chattopadhyay, K.K., Progress in Crystal Growth and Characterization of Materials 50, 52 (2005).Google Scholar
[2] Ueda, K., Hase, T., Yanagi, H., Kawazoe, H. and Hosono, H., J. Appl. Phys. 89, 1790 (2001).Google Scholar
[3] Gordon, R. G., MRS Bull. 25, 52 (2000).Google Scholar
[4] Fang, Z. J., Fang, C., Shi, L. J., Liu, Y. H. and He, M. C., Chinese Phys. Lett. 25, 2997 (2008).Google Scholar
[5] Thomas, G., Nature 389, 907 (1997).Google Scholar
[6] Yanagi, H., Kawazoe, H., Kudo, A., Yasukawa, M. and Hosono, H., J. Electroceramics 4:2/3, 407 (2000).Google Scholar