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Formation of Mesoscopic Polymer Dots by Rubbing Transfer

Published online by Cambridge University Press:  10 February 2011

M. Sano
Affiliation:
Chemotranfiguration Project – JST, 2432 Aikawa, Kurume, Fukuoka 839–0861 Japan
J. Okamura
Affiliation:
Chemotranfiguration Project – JST, 2432 Aikawa, Kurume, Fukuoka 839–0861 Japan
S. Shinkai
Affiliation:
Chemotranfiguration Project – JST, 2432 Aikawa, Kurume, Fukuoka 839–0861 Japan
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Abstract

Regularly spaced polymer dots are formed on a silicon surface by rubbing a thin polymer plate against the silicon substrate. Typically, the disk-shaped dots are 10 nm in height and 160 nm in diameter, and are separated by 340 nm from each other. It is found that the substrate temperature, the rubbing rate, the polymer viscoelasticity, and wettability against a substrate surface must be within a certain range to produce the aligned dots.

Type
Research Article
Copyright
Copyright © Materials Research Society 1999

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References

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