Hostname: page-component-586b7cd67f-gb8f7 Total loading time: 0 Render date: 2024-11-24T13:44:06.164Z Has data issue: false hasContentIssue false
  • English
  • Français

Formation and Properties of TiSi2 as Contact Material for High-Temperature Thermoelectric Generators

Published online by Cambridge University Press:  29 November 2012

Fabian Assion ,
Marcel Schönhoff  and
Ulrich Hilleringmann
Fabian Assion
Affiliation:
Department of Sensor Technology, University of Paderborn, 33098 Paderborn, Germany
Marcel Schönhoff
Affiliation:
Department of Sensor Technology, University of Paderborn, 33098 Paderborn, Germany
Ulrich Hilleringmann
Affiliation:
Department of Sensor Technology, University of Paderborn, 33098 Paderborn, Germany
Get access

Abstract

Thermoelectric generators (TEG) are capable of transforming waste heat directly into electric power. With higher temperatures the yield of the devices rises which makes high-temperature contact materials important. The formation of titanium disilicide (TiSi2) and its properties were analyzed and optimized for the use in TEG. Depending on a direct or an indirect transformation into the C54 crystal structure the process forms a layer with a resistivity of 20-22 μΩcm. Process gases influence the resistivity and result in difference of 20 %. The growing rate of TiSi2on silicon dioxide was determined; it shows a strong dependence on the used atmosphere and temperature. A maximum overgrowing length of 30 μm was found.

Keywords

thermoelectricelectrical propertieswaste management
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1490: Symposium B – Thermoelectric Materials Research and Device Development for Power Conversion and Refrigeration , 2013 , pp. 97 - 102
Copyright
Copyright © Materials Research Society 2012 

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

Energetics, Energy Use, Loss, and Opportunities Analysis: U.S M&M; pp. 17; 2004.Google Scholar
Colgan, E.G. et al. ; Materials Science and Engineering; 16; p. 43 – 96; 1996.CrossRefGoogle Scholar
Ma, Z., Allen, L. and Allman, D.; ‘Microstructural aspects and mechanism of the C49-to-C54 polymorphic transformation in titanium disilicide’; J. Appl. Phys.; 77(8); 1995.CrossRefGoogle Scholar
Murarka, S. P.; ‘Self-aligned silicides or metals for very large scale integrated circuit applications‘ in Journal of Vacuum Science & Technology; 4 (6); p. 1325 – 1331; 1986.Google Scholar
Maex, K. and van Rossum, M.; ‘Properties of Metal Silicides’; INSPEC; 1995.Google Scholar
NBS Monograph 25 (USA); no. 21; p. 126; 1984.CrossRefGoogle Scholar
Samsonov, G.V., Vinitskii, I.M.; Handbook of Refractory Compounds; 1980.CrossRefGoogle Scholar
Rosenkrantz, R.. Frommeyer, G.; Z. Met. Kd. (Germany); vol. 83; no. 9; p. 685–689; 1992.Google Scholar
Kosolapova, T.V.; Handbook of High Temperature Compounds: Properties, Production, Application (Hemishere Publishing Corporation); 1990.Google Scholar
Wessels, P.J.J., Jongste, J.F., Janssen, G.C.A.M., Mulder, A.L., Radelaar, S., Loopstra, O.B.; J. Appl. Phys. (USA); vol. 63; no. 10; p. 4979–4982; 1988.CrossRefGoogle Scholar
Massalski, T.B.; Binary Alloy Phase Diagrams, 2nd edition; vol. 1-3; ASM; 1990.CrossRefGoogle Scholar
Engström, I., Lönnberg, B.; J. Appl. Phys. (USA); vol. 63; p.4476–4484; 1988.CrossRefGoogle Scholar
Duboz, J.Y. et al. ; Appl. Surf. Sci. (Netherlands) ; vol. 38; p. 171–177; 1989.CrossRefGoogle Scholar
Ganin, E., Wind, S., et al. ; MRS Symposium Proceedings, vol. 303, Rapid Thermal and Integrated Processing 11, edited by Gelpey, Jeffrey C., Elliott, J. Kiefer, et al. ; MRS, Pittsburgh, PA; pp. 109; 1993.Google Scholar
Iida, S.; Abeb, S.; Appl. Surface Sci.; Vol. 78 (2), p141–146, June 1994.CrossRefGoogle Scholar
Okamoto, T.; Tsukamoto, K.; Shimizuan, M. and Matsukawa, T.; ‘Titanium silicidation by halogen lamp annealing’; J. Appl. Phys; 57 (12); pp. 5251–5255; 1985.CrossRefGoogle Scholar
Assion, F., Schönhoff, M. and Hilleringmann, U.: “Titaniumdisilicide as High-Temperature Contact Material for Thermoelectric Generators”; International Conferenc on Thermoelectrics, Aalborg, Denmark, 9-12 July, 2012.Google Scholar