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Fluorinated Diamond-Like Carbon Films Produced by Plasma Immersion Ion Processing Technique

Published online by Cambridge University Press:  10 February 2011

M. Hakovirta ,
D. H. Lee ,
X. M. He  and
M. Nastasi
M. Hakovirta
Affiliation:
Los Alamos National Laboratory, Los Alamos, NM 87545
D. H. Lee
Affiliation:
Los Alamos National Laboratory, Los Alamos, NM 87545
X. M. He
Affiliation:
Los Alamos National Laboratory, Los Alamos, NM 87545
M. Nastasi
Affiliation:
Los Alamos National Laboratory, Los Alamos, NM 87545
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Abstract

Fluorinated diamond-like carbon (F-DLC) coatings were deposited on polished silicon substrates with plasma immersion ion processing (PIIP) technique. In the PIIP technique, pulsed glow discharge plasma from a mixture of acetylane and hexafluoroethane gases was used. Contact angle measurements were performed in order to see the un-wetting properties of the coatings. The film composition was measured with Rutherford Backscattering Spectroscopy (RBS) and Elastic Recoil Detection Analysis (ERDA) and the hardness was measured with a Nanoindenter® II. The results clearly show that the un-wetting properties and hardness are strongly dependent on the fluorine incorporation in the F-DLC coatings. With optimized gas ratio of acetylane and hexafluoroethane gases, a combination of extremely good un-wetting properties and high hardness was achieved.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 593: Symposium U – Amorphous & Nanostructured Carbon , 1999 , 285
Copyright
Copyright © Materials Research Society 2000

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References

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