Hostname: page-component-78c5997874-xbtfd Total loading time: 0 Render date: 2024-11-01T22:51:34.599Z Has data issue: false hasContentIssue false
  • English
  • Français

Field Emission Properties of Disordered and Partially Ordered Nano Clustered Carbon Films

Published online by Cambridge University Press:  10 February 2011

B. F. Coll ,
J. E. Jaskie ,
J. L. Markham ,
E. P. Menu ,
A. A. Talin  and
P. Von Allmen
B. F. Coll
Affiliation:
Motorola FPDD, 7700 S. River Parkway, Tempe, AZ 85284
J. E. Jaskie
Affiliation:
Motorola FPDD, 7700 S. River Parkway, Tempe, AZ 85284
J. L. Markham
Affiliation:
Motorola FPDD, 7700 S. River Parkway, Tempe, AZ 85284
E. P. Menu
Affiliation:
Motorola FPDD, 7700 S. River Parkway, Tempe, AZ 85284
A. A. Talin
Affiliation:
Motorola FPDD, 7700 S. River Parkway, Tempe, AZ 85284
P. Von Allmen
Affiliation:
Motorola FPDD, 7700 S. River Parkway, Tempe, AZ 85284
Get access

Abstract

The fabrication of an efficient cold cathode emitter from carbon is based on a combination of material properties, which must be carefully tailored during deposition. We present the electron emission characteristics of several carbon films deposited by cathodic arc evaporation, and their correlation with the chemical composition, microtexture and microstructure of the films. The emission threshold field voltage, emission site density, uniformity and stability of both tetrahedral amorphous carbon, nitrogen doped carbon and nanoclustered carbon films will be reviewed. We will also address issues related to the deposition method, such as substrate temperature, defect density and scalability, in connection with requirements for the fabrication of field emission displays.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 498: Symposium AA – Covalently Bonded Disordered Thin-Film Materials , 1997 , 185
Copyright
Copyright © Materials Research Society 1998

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Spindt, C.A., Brodie, I., Humphrey, L. and Westerberg, E. R., J. Appl. Phys. 47, p. 5248, (1976).Google Scholar
2. Courreges, F., SID 96 Digest, p. 45 (1996).Google Scholar
3. Jaskie, J. E., MRS Bulletin 21 (March 1996).Google Scholar
4. Kumar, N., Schmidt, H., and Xie, C., Solid State Technol. 38, p. 71 (1995).Google Scholar
5. Himpsel, F. J., Knapp, J. A., Van Vetchen, J. A. and Eastman, D. E., Phys. Rev. B, 20(2), p. 624 (1979).Google Scholar
6. Bandis, C., and Pate, B. B., Phys. Rev. Lett. 74 (5), p. 777 (1995).Google Scholar
7. Xu, N. S., Tzeng, Y. and Latham, R. V., J. Phys. D: Appl. Phys., 26, 1776 (1993).Google Scholar
8. Geiss, M. W., Twichell, J. C, Macaulay, J. and Okano, K., Appl. phys. Lett., 67, p. 1328 (1993).Google Scholar
9. Zhu, W., Kochanski, G. P., Jin, S. and Seibles, L., J. Appl. Phys., 78, p. 2707 (1995).Google Scholar
10. Lacher, F., Wild, C., Behr, D. and Koidl, P., Electron Emission of Amorphous Carbon Films, Poster at Diamond Conference, Tours, September 1996.Google Scholar
11. Talin, A. A., Pan, L. S., McCarty, K. F., Doerr, H. J. and Bunshah, R. F., Appl. Phys. Lett. 69, p. 3842 (1996).Google Scholar
12. Zeng, F., Brown, I. G. and Ager, J. W., J. Mater Res. 10, p. 1585 (1995).Google Scholar
13. Amaaratunga, G. A. and Silva, S. R. P., Applied Phys. Letters, 68, p. 2529 (1996).Google Scholar
14. Robertson, J., Diamond Related Mat. 5 (1996).Google Scholar
15. Becker, R. S., Higashi, G. S., Chabal, Y. J. and Becker, A. J., Phys. Rev. Lett. 65, p. 197 (1990).Google Scholar
16. Daalder, J. E., Thesis “Cathode Erosion of Metal Vapor Arcs in Vacuum”, Eindhoven University, The Netherlands (1978).Google Scholar
17. Coll, B. F., Jaskie, J., Markham, J., Menu, E. and Talin, A., “Preparation of disordered amorphous and partially ordered nano clustered carbon films by Arc deposition: a critical review,” SMAC 1997, Cambridge (to be published).Google Scholar
18. Talin, A., Coll, B. F., Jaskie, J., Markham, J. and Menu, E., “Carbon Cathode Requirements and Emission Characterizationfor Low Voltage Field Emission display,” SMAC 1997, Cambridge (to be published).Google Scholar
19. Gröning, O., Kiittel, O. M., Gröning, P., and Schlapach, L., Appl. Surface Science, 111, p. 135 (1997).Google Scholar
20. Pan, L. S., Mater. Res. Soc. Proc. Fall Meeting, Boston MA, (1995) DD8.2.Google Scholar
21. Hoffman, U., Weber, A., Lochen, T., Klages, C. P., Spaeth, C. and Richter, F. (to be published in diamond and related material proceedings from Diamond 1997, Edinburgh).Google Scholar
22. Veerasamy, V. S., Yuan, J., Amaaratunga, G. A., Milne, W., Gilkes, K. W. R., Weiler, M. and Brown, L. M., Pys. Rev. B48, 24, p. 17 954–17 959 (1993).Google Scholar
23. Davis, C. A., McKenzie, D. R., Yin, Y., Kravtchinskaia, E., Amaaratunga, G. A., Veerasamy, V. S., Pys. Rev. B69, 6, p. 1133–1140 (1994).Google Scholar
24. Sjöström, H., Stafström, S., Boman, M. and Sundgren, J-E., Pys. Rev. B75, 7, p. 1336–1339 (1995).Google Scholar
25. Sjöström, H., Ivanov, I., Johanson, M., Hultman, L., Sundgren, J-E., Hainsworth, S. V., Page, T. P. and Wallendberg, L. R., Thin Solid films 246, p. 103–109 (1994).Google Scholar
26. Gröning, O., Küttel, O. M., Gröning, P., and Schlapach, L., Appl. Phys. Lett. 71(16), p. 2253 (1997).Google Scholar
27. Collins, P. G. and Zettl, A., Appl. Phys. Lett. 69 (13) p. 1969 (1996).Google Scholar
28. de Heer, W. A., Chatelain, A., and Ugarte, D., Science 270, p. 1179 (1995).Google Scholar
29. Mercer, T. W., DiNardo, N. J., Rothman, J. B., Siegal, M. P., Friedman, T. A. and Martinez-Miranda, L. J.; “Electron Emission Induced in Amorphous Tetrahedral Diamond-Like Carbon”, to be published in Applied Physics Letters.Google Scholar
30. Kratschmer, W., Lamb, L. D. and Fostiropoulos, K., Nature 347, p. 354 (1990).Google Scholar
31. Ebbesen, T. W., Ann. Rev. Mater. Sci., 24 p. 235 (1994).Google Scholar
32. Ebbesen, T. W. and Ajayan, P. M., Nature 358 p. 220 (1992).Google Scholar