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Ferroelectric films as a Fashion Object for Polycrystalline Film Investigation

Published online by Cambridge University Press:  10 February 2011

V. Petrovsky ,
H.U. Anderson  and
M. Shumsky
V. Petrovsky
Affiliation:
Department of Ceramic Engineering, University Missouri-Rolla, Rolla, MO 65401
H.U. Anderson
Affiliation:
Department of Ceramic Engineering, University Missouri-Rolla, Rolla, MO 65401
M. Shumsky
Affiliation:
Department of Ceramic Engineering, University Missouri-Rolla, Rolla, MO 65401
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Abstract

BaxSr1-xTiO3 (BST), PbZrxTi1-xO3 (PZT) and two layer PZT-BST films were prepared on Pt, Si(100) and Si(111) substrates by a sol-gel method. XRD analysis shows that the PZT films on the Si(111) substrates tended to be preferentially oriented in the (110) direction. The nondestructive readout of the state of ferroelectric polarization was investigated by three methods: the pyroelectric effect, the non-linearity of the capacitance and the field effect in MOS structures. It is shown that all three methods provide nondestructive readout, and the choice between them depends on the intended use.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 472: Symposium I – Polycrystalline Thin Films - Structure, Texture, Properties..III , 1997 , 251
Copyright
Copyright © Materials Research Society 1997

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References

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