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Fatigue Testing Machine of Micro-Sized Specimens for MEMS Applications

Published online by Cambridge University Press:  10 February 2011

Y. Higo ,
K. Takashima ,
M. Shimojo ,
S. Sugiura ,
B. Pfister  and
M. V. Swain
Y. Higo
Affiliation:
Precision and Intelligence Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, JAPAN, [email protected]
K. Takashima
Affiliation:
Precision and Intelligence Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, JAPAN, [email protected]
M. Shimojo
Affiliation:
Precision and Intelligence Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, JAPAN, [email protected]
S. Sugiura
Affiliation:
Nissei Sangyo Co. Ltd., 1-24-14 Nishi-shimbashi, Minato-ku, Tokyo 105-8717, JAPAN
B. Pfister
Affiliation:
CSIRO, Bradfield, NSW 2070, Australia
M. V. Swain
Affiliation:
Biomaterials Science Research Unit, University of Sydney, Australian Technology Park, Eveleigh, NSW 1430, Australia
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Abstract

A new type of fatigue testing machine for micro-sized specimens for MEMS applications has been developed. This fatigue testing machine consists of a magnetostrictive actuator which is able to impart small displacements to a specimen upto 20 νm with resolution of 5 nm. The actuator is connected to a metal shaft and a diamond tip of 5 νm in radius is attached to the end of the shaft. Small displacements are applied to the specimen through the diamond tip. This makes it possible to construct a high stiffness loading fixture. The magnitude of load applied to the specimen is measured by a strain gauge type load cell with a load resolution of 10 νN. The specimen stage and load cell can be moved to adjust the loading position precisely by a stepping motor at a translation resolution of 0.1 νm. Cantilever beam type specimens with dimensions of 10 × 12 × 50 νm3 were prepared from a Ni-P amorphous thin film by focused ion beam machining. Very small cyclic load (ΔP = 0.1 - 40 mN) was able to be applied to the specimen successfully. This machine appears to be promising for evaluation of fatigue properties for micro-sized specimens for MEMS applications.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 605: Symposium MM – Materials Science of Microelectromechanical Systems Devices II , 1999 , 241
Copyright
Copyright © Materials Research Society 2000

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