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Facile Fabrication and Integration of Patterned Nanostructured Titania into Microsystems: Effect of Parent Ti Microstructure on Kinetics of Reaction

Published online by Cambridge University Press:  15 February 2011

Diana M. DeRosa ,
Abu Samah Zuruzi  and
Noel C. MacDonald
Diana M. DeRosa
Affiliation:
National Nanotechnology Infrastructure Network, University of California, Santa Barbara, CA 93106, USA. Biosystems Engineering Department, and Biochemistry and Molecular Biophysics Department, The University of Arizona, Tucson, AZ 85721, USA.
Abu Samah Zuruzi
Affiliation:
Materials Department and Mechanical and Environmental Engineering Department, University of California, Santa Barbara, CA 93106, USA.
Noel C. MacDonald
Affiliation:
Materials Department and Mechanical and Environmental Engineering Department, University of California, Santa Barbara, CA 93106, USA.
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Abstract

One promising route to integrate nanostructured titania (NST) into nano/micro electrical mechanical systems (N/MEMS) devices is by reacting Ti films with aqueous hydrogen peroxide (aq. H2O2) solution. However, little is known about the reaction kinetics between aq. H2O2 and Ti thin films. Here, the effect of Ti microstructure and film thickness on kinetics of reaction was investigated. For films less than 50 nm thick, the kinetics is interface-reaction controlled. For thicker films, the reaction is controlled by diffusion through a hydrated titania gel layer. Activation energies of these kinetics were extracted. Pore size of NST is affected by thickness of parent Ti films. Depending on thickness of parent Ti films, NST with average pore sizes ranging from 15 nm to 150 nm was formed. The ability to form integrated porous NST features with controllable pore sizes may have implications on the development of devices for drug delivery and macromolecular separation.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 876: Symposium A – Nanoporous and Nanostructured Materials for Catalysis, Sensor and Gas Separation Applications , 2005 , R8.12
Copyright
Copyright © Materials Research Society 2005

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