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Fabrication of CNT/metal torsional resonator structures on GaAs

Published online by Cambridge University Press:  01 February 2011

Seung Sae Hong ,
Jung Hoon Bak ,
Byung Yang Lee ,
Sung Woon Cho ,
Young Duck Kim ,
Seunghun Hong  and
Yun Daniel Park
Seung Sae Hong
Affiliation:
[email protected], Seoul National University, Department of Physics and Astronomy, Seoul, 151-747, Korea, Republic of, 8228852361, 8228822361
Jung Hoon Bak
Affiliation:
[email protected], Seoul National University, CSCMR, NS50, Seoul, 151-747, Korea, Republic of
Byung Yang Lee
Affiliation:
[email protected], Seoul National University, Department of Physics and Astronomy, NS50, Seoul, 151-747, Korea, Republic of
Sung Woon Cho
Affiliation:
[email protected], Seoul National University, CSCMR, NS50, Seoul, 151-747, Korea, Republic of
Young Duck Kim
Affiliation:
[email protected], Seoul National University, CSCMR, NS50, Seoul, 151-747, Korea, Republic of
Seunghun Hong
Affiliation:
[email protected], Seoul National University, Department of Physics and Astronomy, NS50, Seoul, 151-747, Korea, Republic of
Yun Daniel Park
Affiliation:
[email protected], Seoul National University, CSCMR, NS50, Seoul, 151-747, Korea, Republic of
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Abstract

We present a method to realize nanoelectromechanical systems (NEMS) resonator structures from carbon nanotubes (CNT)/metal layered composite structures. The method utilizes a self aligning process over a near 2-D CNT network on GaAs to realize resonator structures and a highly selective etchant, a standard citric acid/hydrogen peroxide solution, to achieve release of NEMS resonators from the substrate. We find this method along with critical point drying (CPD) to yield robust hybrid CNT/metal resonator structures with fundamental resonant frequencies in the 10 MHz range. With high reflectivity, conductivity, and bio-compatibility of metals, this fabrication method along with possible benefits of CNT have many application possibilities.

Keywords

microelectro-mechanical (MEMS)compositenanostructure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1018: Symposium EE – Applications of Nanotubes and Nanowires , 2007 , 1018-EE08-12
Copyright
Copyright © Materials Research Society 2007

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