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Excimer Laser-Induced Surface Activation of Aln for Electroless Metal Deposition

Published online by Cambridge University Press:  25 February 2011

Hilmar Esrom
Hilmar Esrom*
Affiliation:
Asea Brown Boveri AG, Corporate Research, W-6900 Heidelberg, FRG
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Abstract

A new method for selective metal deposition on aluminum nitride (AIN) is presented. Excimer laser radiation is used for local decomposition of AIN in air. The degree of the surface modification depends on the fluence and number of pulses. A distinct wavelength dependence of the threshold fluence decomposition of AIN was found. The irradiated surface regions act as catalysts in conventional electroless metal plating baths. Structured metal coatings of various elements (Cu, Ni, Au, Pd, etc.) on AIN can thus be obtained in a simple way.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 204: Symposium E – Chemical Perspectives of Microelectronic Materials II , 1990 , 457
Copyright
Copyright © Materials Research Society 1991

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References

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