Published online by Cambridge University Press: 15 February 2011
We do not observe any immobile deuterium in secondary ion mass spectrometry D profiles taken after long anneals of hydrogenated amorphous silicon sandwich structures with a thin deuterated interior layer. This suggests that a single deep H level (∼1.4 eV deep) controls H diffusion. On its face, our result contradicts nuclear magnetic resonance and H effusion measurements that show about 30% of H in a-Si:H is “isolated” and deeply bound (∼ 2.1 eV deep). We reconcile our experimental results with the existence of isolated deep H by assuming there is a low-barrier (<< 1.4 eV) exchange process between free H and deep D. In tracer experiments, exchange has the effect of increasing the apparent emission rate of the deep D to nearly that of the shallowest trapped H. We solve for the D profiles and confirm that a deep-trapped D component is consistent with our D tracer profiles if and only if exchange processes are important. We also find that the mean distance D travels before retrapping (100–200Å) is determined by an exchange process of free D with trapped H.