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Evaluation of Mechanical Properties of DLC-TiC Microlaminate Coatings

Published online by Cambridge University Press:  10 February 2011

R. Bahl ,
M. Vedawyas ,
D. Patel ,
Ashok Kumar  and
M. Shamsuzzoha
R. Bahl
Affiliation:
Department of Electrical and Computer Engineering, University of South Alabama, Mobile, AL 36688, [email protected]
M. Vedawyas
Affiliation:
Department of Electrical and Computer Engineering, University of South Alabama, Mobile, AL 36688, [email protected]
D. Patel
Affiliation:
Department of Electrical and Computer Engineering, University of South Alabama, Mobile, AL 36688, [email protected]
Ashok Kumar
Affiliation:
Department of Electrical and Computer Engineering, University of South Alabama, Mobile, AL 36688, [email protected]
M. Shamsuzzoha
Affiliation:
Department of Metallurgical and Materials Engineering, The University of Alabama, Tuscaloosa, AL 35487
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Abstract

Microlaminate coatings are made of many alternating layers of two hard materials that, when combined in very thin layer on the nanometer scale, produce coatings with hardness that approaches diamond. In this report, we address these properties, from our investigations on the multilayer structures of titanium carbide (TIC) and diamond-like carbon (DLC) deposited on Si (100) substrates using pulsed laser deposition (PLD) technique. X-ray diffraction and Raman spectroscopy were used for the structural studies and the mechanical properties were analysed by the nano-indention technique. Microlaminate coatings of TiC/DLC and DLC/TiC coatings with varying layers were deposited on Si(100) substrates. Analysis of mechanical properties revealed that the hardness and modulus values of the multi-layers lie between those of monolithic coatings of TIC and DLC.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 594: Symposium V – Thin Films - Stresses & Mechanical Properties VIII , 1999 , 331
Copyright
Copyright © Materials Research Society 2000

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References

REFERENCES

1. Mathews, A. and Eskildsen, S.S., Diamond Relat. Mater. 5, 902 (1993)Google Scholar
2. Voevidin, A. A., Bantle, R. and Mathews, A., Wear 185, 151 (1995)Google Scholar
3. Davanloo, F., Jeungerman, E. M., Jander, D. R., Lee, T. J. and Collins, C. B., J. Appl. Phys. 66, 2081 (1990)Google Scholar
4. Kumar, A., Ekanayake, U. and Kapat, J.S., Surf. Coat. Technol 102, 113 (1998)Google Scholar
5. Kumar, A., Inturi, R. B., Vohra, Y., in Advanced Laser Processing of Materials - Fundamentals and Applications edited by Singh, R., Norton, D., Laude, L., Narayan, J. and Cheung, J. Google Scholar
6. Davis, C. A., Thin Solid Films 226, 30, (1993)Google Scholar
7. Robertson, J., Diamond Relat. Mater. 3, 361 (1994)Google Scholar
8. Voevidin, A.A., Rebholz, C. and Mathews, A., STLEJ. Tribol. Trans. 38, 829 (1995)Google Scholar
9. Voevidin, A.A., Bultman, J. and Zabinski, J. S., Surf. Coat. Technol. 107, 12 (1998)Google Scholar
10. Doll, G.L. in Surface Engineering: Science and Technology I, edited by Kumar, A., Chung, Y.W., Moore, J.J. and Smugeresky, J.E. (TMS, Warrendale, PA, 1999) p. 295 Google Scholar
11. Verprek, S., Hausmann, M. and Reiprich, S., J. Vac. Sci. Technol. A 14, p.46 (1996)Google Scholar
12. Voevidin, A. A., Walck, S. D. and Zabinski, J. S., Wear 203–204, p. 516 (1997)Google Scholar
13. Bahl, R., Kumar, A., Vedawyas, M. and Patel, D., Accepted for publication in Appl. Phys. A.Google Scholar
14. Erdemir, E., Bindal, C., Pagan, J. and Wilbur, P., Surf. Coat. Technol. 76–77, p.559 (1995)Google Scholar
15. RonKainen, H., Likonen, J., Koshinen, J. and Varjus, S., Surf. Coat. Technol. 79, p. 87 (1996)Google Scholar
16. Lyubinov, V. V., Voevidin, A. A., Sparsky, S.E. and Yerokhin, A.L., Thin solid Films 207, p. 117 (1992)Google Scholar
17. Voevidin, A. A., Prasad, S. V. and Zabinski, J. S., J. Appl. Phys. 82, 855 (1997)Google Scholar