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Evaluation of Design and Performance of a Cryogenic Mems Micropump Realized with Si-Based Diaphragm Using Combination of Zygo/Wyko Interferometer and Raman Spectroscopy

Published online by Cambridge University Press:  01 February 2011

Yi Zhao ,
Daryl Ludlow ,
Biao Li  and
Xin Zhang
Yi Zhao
Affiliation:
Department of Manufacturing Engineering and Fraunhofer USA Center for Manufacturing, Innovation, Boston University, Boston, MA 02215, USA
Daryl Ludlow
Affiliation:
Department of Manufacturing Engineering and Fraunhofer USA Center for Manufacturing, Innovation, Boston University, Boston, MA 02215, USA
Biao Li
Affiliation:
Department of Manufacturing Engineering and Fraunhofer USA Center for Manufacturing, Innovation, Boston University, Boston, MA 02215, USA
Xin Zhang
Affiliation:
Department of Manufacturing Engineering and Fraunhofer USA Center for Manufacturing, Innovation, Boston University, Boston, MA 02215, USA
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Abstract

This paper reports work concerning a silicon-based micro pump for use in a cryogenic cooling system. The diaphragm deflection, which is critical for the control of pumping capacity, was accurately derived using a combination of ZYGO and WYKO interferometer. The relationship between the pumping capacity and differential pressure was further achieved. Stress distribution was obtained using Micro Raman spectroscopy. It was found that Young's modulus derived from the maximum deflection increases with decreasing temperature. The compressive stress concentrates at the edge centers; whereas the tensile stress occurs at the diaphragm center. There is a fairly good match between the theoretical predications and experimental observations.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 782: Symposium A – Micro- and Nanosystems , 2003 , A5.52
Copyright
Copyright © Materials Research Society 2004

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References

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