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Epitaxial growth of LiNbO3 thin films by excimer laser ablation method and their surface acoustic wave properties

Published online by Cambridge University Press:  01 January 1992

Yoshihiko Shibata ,
Kiyoshi Kaya ,
Kageyasu Akashi ,
Masaki Kanai ,
Tomoji Kawal  and
Shichlo Kawal
Yoshihiko Shibata
Affiliation:
Kawasaki Laboratory, Corporate research Laboratories (Tokyo), Asahi Chemical Industry Co., Ltd. Yakoh, Kawasaki, Kanagawa 210 Japan
Kiyoshi Kaya
Affiliation:
Kawasaki Laboratory, Corporate research Laboratories (Tokyo), Asahi Chemical Industry Co., Ltd. Yakoh, Kawasaki, Kanagawa 210 Japan
Kageyasu Akashi
Affiliation:
Kawasaki Laboratory, Corporate research Laboratories (Tokyo), Asahi Chemical Industry Co., Ltd. Yakoh, Kawasaki, Kanagawa 210 Japan
Masaki Kanai
Affiliation:
The Institute of Scientific and Industrial Research, Osaka University, Mihogaoka, Ibaraki, Osaka 567, Japan
Tomoji Kawal
Affiliation:
The Institute of Scientific and Industrial Research, Osaka University, Mihogaoka, Ibaraki, Osaka 567, Japan
Shichlo Kawal
Affiliation:
The Institute of Scientific and Industrial Research, Osaka University, Mihogaoka, Ibaraki, Osaka 567, Japan
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Abstract

We have formed epitaxial LiNbO3 thin films on sapphire substrates (001),(110) and (012) using an excmer-laser ablation technique. We have fabricated surface acoustic wave (SAW) filters on the films and evaluated SAW properties. It is demonstrated that the LINbO3 thin films on the sapphire substrates are candidates for a high frequency SAW filter because of their high velocities of propagation (5300–5600m/s).

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 285: Symposium I – Laser Ablation in Materials Processing–Fundamentals and Applications , 1992 , 361
Copyright
Copyright © Materials Research Society 1993

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References

REFERENCES

1. Shibata, Y., Kaya, K., Akashi, K., Kanal, M., Kawal, T. and Kawai, S., Appl. Phys. Lett., 61, 1000 (1992).Google Scholar
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