Hostname: page-component-586b7cd67f-gb8f7 Total loading time: 0 Render date: 2024-11-29T06:22:28.218Z Has data issue: false hasContentIssue false

Endotaxial Growth Mechanisms of Sn Quantum Dots in Si Matrix

Published online by Cambridge University Press:  10 February 2011

P. Möck
Affiliation:
Department of Physics, Portland State University, P.O. Box 751, Portland, OR 97207-0751, [email protected]
Y. Lei
Affiliation:
Department of Physics, University of Illinois at Chicago, 845 W. Taylor Street, Chicago, IL 60607-7059
T. Topuria
Affiliation:
Department of Physics, University of Illinois at Chicago, 845 W. Taylor Street, Chicago, IL 60607-7059
N.D. Browning
Affiliation:
Department of Physics, University of Illinois at Chicago, 845 W. Taylor Street, Chicago, IL 60607-7059 Department of Chemical Engineering and Materials Science, University of California at Davis, One Shields Avenue, Davis, CA 95616; and National Center for Electron Microscopy, MS 72-150, Lawrence Berkeley National Laboratory, Berkeley, CA 94720
R. Ragan
Affiliation:
Thomas J. Watson Laboratory of Applied Physics, California Institute of Technology, MS 128-95, Pasadena, CA 91125
K.S. Min
Affiliation:
Thomas J. Watson Laboratory of Applied Physics, California Institute of Technology, MS 128-95, Pasadena, CA 91125
H.A. Atwater
Affiliation:
Thomas J. Watson Laboratory of Applied Physics, California Institute of Technology, MS 128-95, Pasadena, CA 91125
Get access

Abstract

Two distinct mechanisms for the endotaxial growth of quantum dots in the Sn/Si system were observed by means of analytical transmission electron microcopy. Both mechanisms operate simultaneously during temperature and growth rate modulated molecular beam epitaxy combined with ex situ thermal treatments. One of the mechanisms involves the creation of voids in Si, which are subsequently filled by Sn, resulting in quantum dots that consist of pure α-Sn. The other mechanism involves phase separation and leads to substitutional solid solution quantum dots with a higher Sn content than the predecessor quantum well structures possess. In both cases, the resultant quantum dots possess the diamond structure and the shape of a tetrakaidecahedron. (Sn,Si) precipitates that are several times larger than the typical (Sn,Si) quantum dot possess an essentially octahedral shape.

Type
Research Article
Copyright
Copyright © Materials Research Society 2003

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

[1] Bimberg, D., “Quantum dots: Paradigm changes in semiconductor physics”, Semiconductors 33, 951955 (1999).Google Scholar
[2] Ledentsov, N.N., Ustinov, V.M., Shchukin, V.A., Kop'ev, P.S., Alferov, Zh.I., and Bimberg, D., “Quantum dot heterostructures: fabrication, properties, lasers (Review)”, Semiconductors 32, 343365 (1998).Google Scholar
[3] Soref, R.A. and Perry, C.H., “Predicted band gap of the new semiconductor SiGeSn”, J. Appl. Phys. 69, 539541 (1991).Google Scholar
[4] Shiryaev, S.Y., Hansen, J. Lundsgaard, Kringhoj, P., and Larsen, A.N., ”Pseudomorphic Si1-xSnx alloy films grown by molecular beam epitaxy on Si”, Appl. Phys. Lett. 67, 22872289 (1995).Google Scholar
[5] Flyn, M.F., Chevallier, J., Hansen, J. Lundsgaard, and Larsen, A. Nylandsted, ”Relaxation of strained, epitaxial Si1-xSnx ”, J. Vac. Sci. Technol. B 16, 17771785 (1998).Google Scholar
[6] Flyn, M.F., Chevallier, J., Larsen, A. Nylandsted, Feidenhans'l, R., and Seibt, M., “α-Sn and β-Sn precipitated in annealed Si0.95Sn0.05 ”, Phys. Rev. B 60, 57705777 (1999).Google Scholar
[7] Ridder, C., Fanciulli, M., Larsen, A. Nylandsted, and Weyer, G., “Precipitation of Sn in metastable, pseudomorphic Si0.95Sn0.05 films grown by molecular beam epitaxy”, Mater. Sci. Semicond. Processing 3, 251255 (2000).Google Scholar
[8] Min, K.S. and Atwater, H.A., “Ultrathin pseudomorphic Sn/Si and SnxS1-x/Si heterostructures”, Appl. Phys. Lett. 72, 18841886 (1998).Google Scholar
[9] Ragan, R., Min, K.S., and Atwater, H.A., “Direct energy gap group IV semiconductor alloys and quantum dot arrays in SnxGe1-x/Ge and SnxSi1-x /Si alloy systems”, Mater. Sci. Engin. B 87, 204213 (2001).Google Scholar
[10] Mock, P., Lei, Y., Topuria, T., Browning, N.D., Ragan, R., Min, K.S., and Atwater, H.A., “Structural and Morphological Transformations in Self-assembled Sn Quantum Dots in Si Matrix”, Proc. 2003 Nanotechnology Conference and Trade Show, Vol. 3, 7477, 2003.Google Scholar
[11] Mock, P., Topuria, T., Browning, N.D., Dobrowolska, M., Lee, S., Furdyna, J.K., Booker, G.R., Mason, N.J., and Nicholas, R.J., “Internal self-ordering in In(Sb,As), (In,Ga)Sb and (Cd,Mn,Zn)Se nano-agglomerates/quantum dots”, Appl. Phys. Lett. 79, 946948 (2001).Google Scholar
[12] Mock, P., Lei, Y., Topuria, T., Browning, N.D., Ragan, R., Min, K.S., and Atwater, H.A., “Structural transformations in self-assembled semiconductor quantum dots as inferred by transmission electron microscopy”, Physical Chemistry of Interfaces and Nanomaterials, Zhang, Jin Z., Wang, Zhong L., Eds. Proc. of SPIE Vol. 4807, 7182 (2002).Google Scholar
[13] Eaglesham, D.J., White, A.E., Feldman, L.C., Moriya, N., and Jacobson, D.C., “Equilibrium Shape of Si”, Phys. Rev. Lett. 70, 16431646 (1993).Google Scholar
[14] Porter, D.A. and Easterling, K.E., Phase Transformations in Metals and Alloys, Chapman & Hall, London, New York, 1992.Google Scholar
[15] Johnson, W.C., “Influence of Elastic Stress on Phase Transformations”, in: Lectures on the Theory of Phase Transformations, 2nd Edition, Ed. Aaronson, H.I., The Minerals, Metals & Materials Society, Warrendale, 2001.Google Scholar
[16] Neumann's symmetry principle,, yields as the polyhedra that are consistent with the point symmetry group of the interface energy density a tetrakaidecahedron, an octahedron, and a cube. Out of these polyhedra, the tetrakaidecahedron possesses the least symmetry as it has a shape parameter. The shapes of small misfitting precipitates are usually dominated by the anisotropy of the interface energy density [15] and the smallest Sn precipitates should, therefore, possess the shape of a tetrakaidecahedron. Since the lattice s (pressure) is essentially hydrostatic, i.e. isotropic, Curie's symmetry principle,, yields no influence of the misfit stress field on the anisotropy of the interface energy density.Google Scholar
[17] Lei, Y., “Atomic scale analysis of semiconductor quantum dots by scanning transmission electron microscopy”, PhD thesis, 2003, University of Illinois at Chicago.Google Scholar
[18] Lei, Y., Mock, P., Topuria, T., Browning, N.D., Ragan, R., Min, K.S., and Atwater, H.A., “Void Mediated Formation of Sn Quantum Dots in a Si Matrix”, Appl. Phys. Lett., accepted.Google Scholar
[19] Lin, S.H., Mack, I., Pongkrapan, N., and Fraundorf, P., “Ten-nanometer surface intrusions in room temperature silicon”, Electrochem. & Solid State Lett. 5, G83–G85 (2002), con-mat/0110393.Google Scholar
[20] Min, K.S., “Synthesis and Properties of Light-Emitting Si-Based Nanostructures”, PhD thesis, 1999, California Institute of Technology.Google Scholar
[21] Zakharov, N.D., Werner, P., Gosele, U., Heitz, R., Bimberg, D., Ledentsov, N.N., Ustinov, V.M., Volovik, B.V., Alferov, Zh. I., Poluakov, N.K., Petrov, V.N., Egorov, V.A., and Cirlin, G.E., “Structure and optical properties of Si/InAs/Si layers grown by molecular beam epitaxy on Si substrate”, Appl. Phys. Lett. 76, 26772679 (2000).Google Scholar