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Electronic Transport in Co-deposited Hydrogenated Amorphous/Nanocrystalline Thin Films

Published online by Cambridge University Press:  01 February 2011

Y. Adjallah ,
C. Blackwell ,
C. Anderson ,
U. Kortshagen  and
J. Kakalios
Y. Adjallah
Affiliation:
Physics and astronomy, University of Minnesota, 116 Church Street S.E., University of Minnesota, minneapolis, MN, 55455
C. Blackwell
Affiliation:
[email protected], University of Minnesota, Physics and astronomy, 116 Church Street S.E., University of Minnesota, minneapolis, MN, 55455, United States
C. Anderson
Affiliation:
[email protected], University of Minnesota, Mechanical Engineering, 111 Church Street S.E., University of Minnesota, minneapolis, MN, 55455, United States
U. Kortshagen
Affiliation:
[email protected], University of Minnesota, Mechanical Engineering, 111 Church Street S.E., University of Minnesota, minneapolis, MN, 55455, United States
J. Kakalios
Affiliation:
[email protected], University of Minnesota, Physics and astronomy, 116 Church Street S.E., University of Minnesota, minneapolis, MN, 55455, United States, 612624-9856, 612-624-4578
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Abstract

Mixed-phase hydrogenated amorphous silicon thin films containing nanocrystalline silicon inclusions have been synthesized in a dual chamber co-deposition system. A PECVD deposition system produces small crystalline silicon particles (3-5 nm diameter) in a flow-through reactor, and injects these particles into a separate capacitively-coupled plasma chamber in which hydrogenated amorphous silicon is deposited. Raman spectroscopy is used to determine the volume fraction of nanocrystals in the mixed phase thin films, while infra-red spectroscopy characterizes the hydrogen bonding structure as a function of nanocrystalline concentration. At a moderate concentration of 5 nm silicon crystallites, the dark conductivity and photoconductivity are consistently found to be higher than in mixed phase films with either lower or higher densities of nanocrystalline inclusions.

Keywords

amorphousSielectrical properties
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1066: Symposium A – Amorphous and Polycrystalline Thin-Film Silicon Science and Technology—2008 , 2008 , 1066-A02-03
Copyright
Copyright © Materials Research Society 2008

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References

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