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Elastic Constant Effect on the Critical Thickness of an Epilayer

Published online by Cambridge University Press:  21 February 2011

Tong-Yi Zhang
Tong-Yi Zhang*
Affiliation:
Department of Mechanical EngineeringHong Kong University of Science and TechnologyClear Water Bay, Kowloon, Hong Kong
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Abstract

The effect of elastic constants on the critical thickness of an epilayer is investigated. The results indicate that the self energy of the dislocation is controlled by the soft phase between the epilayer and the substrate, while the interaction energy only depends on the elastic constants of the epilayer. It is easier for a dislocation to be formed if the substrate is softer than the epilayer, and consequently the critical thickness is smaller. On the other hand, a soft epilayer can have a large thickness without any mismatch dislocation.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 356: Symposium B2 – Thin Films: Stresses and Mechanical Properties V , 1994 , 325
Copyright
Copyright © Materials Research Society 1995

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