No CrossRef data available.
Article contents
Effects of Silica Sources on Nanoporous Organosilicate Films Templated with Tetraalkylammonium Cations
Published online by Cambridge University Press: 31 January 2011
Abstract
Nanoporous organosilicate films have been recently prepared using tetraalkylammonium cations in acid and basic media, outperforming other materials. Resulting films using basic medium were called zeolite-inspired low-k dielectrics. Here we study the dependence of the properties of these films on the used silica sources: methyltrimethoxy silane (MTMS) and tetraethyl orthosilicate (TEOS). A set of experiments varying the MTMS:TEOS ratio were prepared in acid medium and characterized. A textural, physico-chemical, mechanical, and electrical characterization of this series of experiments is presented.
Keywords
- Type
- Research Article
- Information
- Copyright
- Copyright © Materials Research Society 2009