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The Effects of Catalyst Grain Sizes on the Diameter of MPECVD Grown Patterned Carbon Nanotubes

Published online by Cambridge University Press:  15 February 2011

S. G. Wang ,
Qing Zhang ,
G. F. Zhong ,
S. F. Yoon ,
J. Ahn  and
D. J. Yang
S. G. Wang
Affiliation:
Microelectronics Center, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, Singapore.
Qing Zhang
Affiliation:
Microelectronics Center, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, Singapore.
G. F. Zhong
Affiliation:
Center Of Excellence, Waseda University, 513 Tsurumaki-cho Waseda Shinjuku-ku Tokyo, Japan, Zip 162-0041,Japan.
S. F. Yoon
Affiliation:
Microelectronics Center, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, Singapore.
J. Ahn
Affiliation:
Microelectronics Center, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, Singapore.
D. J. Yang
Affiliation:
Microelectronics Center, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, Singapore.
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Abstract

The electronic structure and properties of carbon nanotubes (CNTs) strongly depend on their diameter and chirality. The well controlled CNTs diameter is becoming one of the challenges for their applications in microelectronics. In this paper, the patterned CNTs were produced by microwave plasma enhanced chemical vapor deposition technique using a metal catalyst of nickel. The correlation between the CNT diameter and the grain sizes of the nickel catalyst was examined. The experimental results show that nickel films converted to nickel particles when they were heated up. The diameter of CNTs increases with increasing grain sizes of the nickel particles, indicating that the CNT diameter can be controlled by controlling the grain sizes of the nickel catalyst.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 772: Symposium M – Nanotube-Based Devices , 2003 , M3.5
Copyright
Copyright © Materials Research Society 2003

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