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The Effect of Line Geometry on Void Growth in Thin, Narrow Aluminum Lines
Published online by Cambridge University Press: 15 February 2011
Abstract
The stress induced growth of individual voids in passivated Al-lines at room temperature was monitored in-situ, without removing the passivation. The kinetics was strongly influenced by variations in line geometry, even over distances of many μm, indicating variations in the stress relaxation as well.
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- Copyright © Materials Research Society 1991
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