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Direct Growth of Single Walled Carbon Nanotubes for the Characterization of Structural and Electronic Properties

Published online by Cambridge University Press:  01 February 2011

Jianfeng Wu ,
Joel Walenza-Slabe ,
Timothy Gutu  and
Jun Jiao
Jianfeng Wu
Affiliation:
[email protected], Portland State University, Department of Physics, P.O. Box 751, Portland, OR, 97207-0751, United States, 503-725-8061
Joel Walenza-Slabe
Affiliation:
[email protected], Portland State University, Department of Physics, P.O. Box 751, Portland, OR, 97207-0751, United States
Timothy Gutu
Affiliation:
[email protected], Portland State University, Department of Physics, P.O. Box 751, Portland, OR, 97207-0751, United States
Jun Jiao
Affiliation:
[email protected], Portland State University, Department of Physics, P.O. Box 751, Portland, OR, 97207-0751, United States
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Abstract

Fabricating horizontally aligned single wall carbon nanotubes (CNTs) with controlled properties has been one of the significant challenges for field-effect transistor (FET) applications. This report demonstrates a novel procedure for the fabrication of horizontally aligned single walled CNTs using the focused ion beam (FIB) and chemical vapor deposition (CVD). This method allows the morphologies, internal structures, and elemental compositions of CNTs to be directly analyzed in the scanning electron microscope (SEM) and transmission electron microscope (TEM) and avoids any sample preparation procedures that might alter the structure of the CNTs. The techniques of electron beam and ion beam induced deposition (EBID and IBID) of Pt electrodes to the CNT ends were compared and both were found to produce metal contamination around the target area. The fabrication of large area electrodes to assist in testing the CNT's electronic properties, including contact resistance and I-V characteristics was investigated. Using this fabrication technique we were able to perform an I-V sweep on a CNT circuit as well as detect the metal contamination on the CNTs which occurred as a result of electrode deposition.

Keywords

chemical vapor deposition (CVD) (deposition)ion-beam assisted depositionnanostructure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1081: Symposium P – Carbon Nanotubes and Related Low-Dimensional Materials , 2008 , 1081-P04-02
Copyright
Copyright © Materials Research Society 2008

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References

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