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Diamond-Like Carbon Deposition for Tribological Applications at Los Alamos National Laboratory

Published online by Cambridge University Press:  15 February 2011

K. C. Walter ,
M. Nastasi ,
H. Kung ,
P. Kodali ,
C. Munson ,
I. Henins  and
B. P. Wood
K. C. Walter
Affiliation:
Los Alamos National Laboratory, MS-K762, Los Alamos, NM, 87545
M. Nastasi
Affiliation:
Los Alamos National Laboratory, MS-K762, Los Alamos, NM, 87545
H. Kung
Affiliation:
Los Alamos National Laboratory, MS-K762, Los Alamos, NM, 87545
P. Kodali
Affiliation:
Los Alamos National Laboratory, MS-K762, Los Alamos, NM, 87545
C. Munson
Affiliation:
Los Alamos National Laboratory, MS-K762, Los Alamos, NM, 87545
I. Henins
Affiliation:
Los Alamos National Laboratory, MS-K762, Los Alamos, NM, 87545
B. P. Wood
Affiliation:
Los Alamos National Laboratory, MS-K762, Los Alamos, NM, 87545
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Abstract

Diamond-like carbon (DLC) films have been deposited on silicon using two deposition techniques. Both deposition techniques used acetylene (C2H2) plasmas as the carbon/hydrogen source. One technique, that is relatively well known, employs an rf-plasma with an associated self-bias on the substrate. DLC films have also been deposited using a pulsed-bias method. Coatings of various thickness have been deposited using both deposition methods, and various combinations of gas pressure and bias. Coating characteristics, such as composition, density, and sp3 content, of selected films will be presented. For each deposition technique, the correlation between coating characteristics, mechanical properties and tribological behavior is presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 383: Symposium I – Mechanical Behavior of Diamond and Other Forms of Carbon , 1995 , 411
Copyright
Copyright © Materials Research Society 1995

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