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Development of Si Microliquid Processing using Piezo Actuator

Published online by Cambridge University Press:  27 June 2011

Muneki Akazawa ,
Shunki Koyanagi  and
Seiichiro Higashi
Muneki Akazawa
Affiliation:
Department of Semiconductor Electronics and Integration Science, Graduate School of Advanced Sciences of Matter, Hiroshima University, Kagamiyama 1-3-1, Higashi-Hiroshima, 739-8530, Japan
Shunki Koyanagi
Affiliation:
Department of Semiconductor Electronics and Integration Science, Graduate School of Advanced Sciences of Matter, Hiroshima University, Kagamiyama 1-3-1, Higashi-Hiroshima, 739-8530, Japan
Seiichiro Higashi
Affiliation:
Department of Semiconductor Electronics and Integration Science, Graduate School of Advanced Sciences of Matter, Hiroshima University, Kagamiyama 1-3-1, Higashi-Hiroshima, 739-8530, Japan
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Abstract

The tip of a Si rod was melted by laser diode (LD) irradiation and we succeeded in dropping small Si droplets by vibration of the Si rod using a piezo actuator. We confirmed multiple small Si droplets under a condition of the resonance frequency of 5.8 kHz for the rod length of 6.0 mm. We observed ejection of droplets from a cone edge of molten Si and the minimum width of the solidified Si was ∼ 1 μ m in diameter. The solidified Si show high crystallinity with the Raman scattering TO phonon band of 515.6 cm-1.

Keywords

Sirapid solidificationcrystal growth
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1321: Symposium A – Amorphous and Polycrystalline Thin-Film Silicon Science and Technology , 2011 , mrss11-1321-a13-02
Copyright
Copyright © Materials Research Society 2011

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References

REFERENCES

1. Kondo, M. et al. ., J. Non-Cryst. Solids 266–269 (2000) 84.10.1016/S0022-3093(99)00744-9Google Scholar
2. Shah, A. et al. ., Thin Solid Films 403–404 (2002) 179.10.1016/S0040-6090(01)01658-3Google Scholar
3. Kosku, N. et al. ., Appl. Surf. Sci. 244 (2005) 39.10.1016/j.apsusc.2004.10.063Google Scholar
4. Koba, N. et al. ., Proc. Int. TFT Conf. (2009) 263.Google Scholar
5. Higashi, S. et al. ., Abst. ICANS23 (2009) 252.Google Scholar
6. Matsumoto, T. et al. ., Abst. of 19th PVSEC (2009) 295.Google Scholar