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Determination of Elastic Constants and Viscosity of Amorphous Thin Films From Substrate Curvature

Published online by Cambridge University Press:  16 February 2011

Ann Witvrouw  and
Frans Spaepen
Ann Witvrouw
Affiliation:
Division of Applied Sciences, Harvard University, Cambridge, MA 02138.
Frans Spaepen
Affiliation:
Division of Applied Sciences, Harvard University, Cambridge, MA 02138.
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Abstract

Substrate curvature measurements were used to monitor viscous flow in Pd79Si21 films at temperatures between 100 and 250°C. To determine the viscosity and the change in viscosity the elastic constants of the film were measured by depositing films on pre-bent substrates: E = 10 ± 1 1010 Pa and ν = 0.43 ± 0.04 The activation enthalpy for η is 13 ± 1 kJ/mole.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 188: Symposium K – Thin Films: Stresses and Mechanical Properties II , 1990 , 147
Copyright
Copyright © Materials Research Society 1990

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References

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