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Depth Sensing Indentation of Thin Hard Films: A Study of Modulus Measurement Sensitivity to Indentation Parameters

Published online by Cambridge University Press:  10 February 2011

Nigel M. Jennett  and
Jan Meneve
Nigel M. Jennett
Affiliation:
National Physical Laboratory UK, Centre for Materials Measurement and Technology, Teddington Middlesex UK, TWI I OLW, [email protected]
Jan Meneve
Affiliation:
Flemish Institute for Technological Research, Materials Technology Centre, Boeretang 200, Mol, B-2400, Belgium.
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Abstract

The sensitivity of modulus measured by traceably calibrated Depth Sensing Indentation (DSI) is investigated as a function of the indentation parameters: maximum load; loading rate; hold time at maximum load; and single vs. repeated loading. Other issues, including instrument compliance, indenter area function and in-plane anisotropy are also discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 522: Symposium T – Fundamentals of Nanoindentation & Nanotribology , 1998 , 239
Copyright
Copyright © Materials Research Society 1998

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References

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