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Depletion Fraction of Silane and Dominant Neutral Radical in RF Glow Discharge in Silane
Published online by Cambridge University Press: 01 January 1993
Abstract
A quadripole mass spectrometer was installed on the line of a PCVD system to measure the depletion fraction of silane and the monosilicon radicals in the discharges. The paper presents a method of measuring the depletion fraction of silane when setting the mass spectrometer at the high ionization voltage. The experimental results were compared and accordant with those reported before [1,2,3].
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- Copyright © Materials Research Society 1993
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