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Defect Dynamics in Amorphous Silicon – the Recrystallization Process

Published online by Cambridge University Press:  26 February 2011

Sokrates T. Pantelides
Sokrates T. Pantelides*
Affiliation:
IBM Thomas J. Watson Research Center Yorktown Heights, New York 10598
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Abstract

The mechanism that underlies the recrystallization of amorphous silicon tas not been established. It is generally argued, however, that the rearrangement of the network occurs through the breaking of bonds or the introduction of vacancies and that this step is responsible for the observed activation energy (∼2.5 eV). It is suggested here that the rearrangement of the network is accomplished through the migration of intrinsic overcoordination defects (“floating bonds”) and that this process has a small activation energy (∼0.4 eV). The observed large activation energy is actually due to a reaction that inhibits recrystallization. This reaction may be the elimination of preexisting dangling bonds.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 100: Symposium – A Fundamentals of Beam-Solid Interactions and Transient Thermal Processing , 1988 , 387
Copyright
Copyright © Materials Research Society 1988

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References

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