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Deep Photoluminescence Bands in Mbe Grown Si and Sige.
Published online by Cambridge University Press: 15 February 2011
Abstract
Broad photoluminescence (PL) bands with energy position ranging from 0.70 to 1.03 eV, are shown to appear in Si epilayers and Sil−xGex/Si heterostructures grown by molecular beam epitaxy under non-optimized conditions. The presence of a particular broad band (BB) is found to be determined by the growth conditions, in particular by the bias applied to the substrate during the growth. Ion bombardment during the growth is shown to be a main factor enhancing the formation of BB-related defects. To clarify their origin, the effects of post-growth hydrogen treatments and of an external magnetic field are investigated. The BBs are shown to be related to various types of radiative centres, either point or extended defects. A correlation between X-ray diffraction and PL measurements is also observed. The spatial location of the BB-related defects is inferred by results from optically detected cyclotron resonance (ODCR) and PL excitation studies.
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- Copyright © Materials Research Society 1995
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