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Crystallization Kinetics and Texture of Sol-Gel PZT Thin Films

Published online by Cambridge University Press:  10 February 2011

V.Ya. Shur ,
E.B. Blankova ,
A.L. Subbotin ,
E.A. Borisova ,
D. Bolten ,
R. Gerhardt  and
R. Waser
V.Ya. Shur
Affiliation:
IPAM, Ural State University, 62008 Ekaterinburg, Russia, [email protected]
E.B. Blankova
Affiliation:
IPAM, Ural State University, 62008 Ekaterinburg, Russia
A.L. Subbotin
Affiliation:
IPAM, Ural State University, 62008 Ekaterinburg, Russia
E.A. Borisova
Affiliation:
IPAM, Ural State University, 62008 Ekaterinburg, Russia
D. Bolten
Affiliation:
IWE Rhein.-Westf. Technichen Hochschule Aachen, 52056 Aachen, Germany
R. Gerhardt
Affiliation:
IWE Rhein.-Westf. Technichen Hochschule Aachen, 52056 Aachen, Germany
R. Waser
Affiliation:
IWE Rhein.-Westf. Technichen Hochschule Aachen, 52056 Aachen, Germany
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Abstract

The morphology and phase evolution of sol-gel PZT thin films during rapid thermal annealing are investigated by in situ recording of scattered light intensity measured in reflected mode and momentary patterns visualized by optical microscope. In addition the texture and fractions of growing phases and the angular dependence of the scattered light are studied in partly annealed films. The kinetic parameters characterizing the transition from pyrochlore to perovskite phase are extracted by mathematical treatment of experimental data. It is shown that the film's texture and the transformation kinetics strongly depend on pyrolysis temperature. A mechanism of texture formation is proposed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 541: Symposium O – Ferroelectric Thin Films VII , 1998 , 363
Copyright
Copyright © Materials Research Society 1999

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References

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