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Confinement and Low-Energy Extraction of Photo-Fragment Ions Using Rf Ion Trapping

Published online by Cambridge University Press:  22 February 2011

Seiji Yamamoto ,
Kozo Mochiji ,
Isao Ochiai  and
Naohiko Mikami
Seiji Yamamoto
Affiliation:
Central Research Laboratory, Hitachi Ltd., Higashi-koigakubo 1–280, Kokubunji, Tokyo 185, Japan
Kozo Mochiji
Affiliation:
Central Research Laboratory, Hitachi Ltd., Higashi-koigakubo 1–280, Kokubunji, Tokyo 185, Japan
Isao Ochiai
Affiliation:
Central Research Laboratory, Hitachi Ltd., Higashi-koigakubo 1–280, Kokubunji, Tokyo 185, Japan
Naohiko Mikami
Affiliation:
Department of Chemistry, Faculty of Science, Tohoku University, Aoba-ku, Sendai 980, Japan
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Abstract

Spatial confinement of mass-selected ions and extracting them to a solid surface at low kinetic energy is achieved by using rf ion trapping which is combined with multi-photon ionization by a KrF laser. SF5+ fragment ions of SF6 generated by photo-ionization are separated from other ionic species and then confined in the cylindrical ion trap cell for at least 100 ms. The stored ions are extracted onto the seniconductor surface. This technique is promising for clarifying surface reactions of semiconductors, which is the key to controlling surface structure on an atomic scale.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 334: Symposium W – Gas-Phase and Surface Chemistry in Electronic Materials Processing , 1993 , 451
Copyright
Copyright © Materials Research Society 1994

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References

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