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Computing Thin Film Mechanical Properties with the Oliver and Pharr Method

Published online by Cambridge University Press:  10 February 2011

P. J. Wolff ,
B. N. Lucas  and
E. G. Herbert
P. J. Wolff
Affiliation:
MTS Nano Instruments Innovation Center, Oak Ridge, TN 37830, [email protected]
B. N. Lucas
Affiliation:
MTS Nano Instruments Innovation Center, Oak Ridge, TN 37830, [email protected]
E. G. Herbert
Affiliation:
MTS Nano Instruments Innovation Center, Oak Ridge, TN 37830, [email protected]
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Abstract

A commonly used technique to compute mechanical properties from indentation tests is the Oliver and Pharr method. Using dimensional analysis and finite element modeling, this paper investigates errors when the Oliver and Pharr method is used to compute thin film properties.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 594: Symposium V – Thin Films - Stresses & Mechanical Properties VIII , 1999 , 301
Copyright
Copyright © Materials Research Society 2000

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References

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