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Combinatorial exploration of new transparent conducting oxide films by using radio frequency sputtering and their application in optoelectronic devices

Published online by Cambridge University Press:  03 February 2012

Tae-Won Kim ,
Gi-Soek Heo ,
Ho-Sung Kim  and
Jong-Ho Lee
Tae-Won Kim
Affiliation:
Energy and applied optics research group, Korea Institute of Industrial Technology, 1110-9, Oryong-dong, Buk-ku, Gwangju, 500-420, Republic of Korea.
Gi-Soek Heo
Affiliation:
NCNE, Korea Institute of Industrial Technology, 1110-9, Oryong-dong, Buk-ku, Gwangju, 500-420, Republic of Korea.
Ho-Sung Kim
Affiliation:
Energy and applied optics research group, Korea Institute of Industrial Technology, 1110-9, Oryong-dong, Buk-ku, Gwangju, 500-420, Republic of Korea.
Jong-Ho Lee
Affiliation:
NCNE, Korea Institute of Industrial Technology, 1110-9, Oryong-dong, Buk-ku, Gwangju, 500-420, Republic of Korea.
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Abstract

The purpose of this study is to develop new transparent conducting oxide (TCO) films by using combinatorial approach and to apply them for organic light emitting diodes (OLED) and/or thin film photovoltaic devices. For this, we have explored several TCO films with multi-components and optimized their properties by employing combinatorial sputtering system. For the first, we have fabricated combinatorial libraries composed Zn-In-Sn-O (ZITO) to reduce In content comparing with Sn-doped indium oxide (ITO). The ZITO films showed amorphous structure at the substrate temperature ranged RT∼ 350 °C, high transmittance over 85% at the visible range wavelength, and resistivity as low as 3x10-4∼10-3Ωcm. These results reveal that the ZITO films have indium composition as low as 30∼40% comparing with equivalent ITO films. Furthermore, we have fabricated OLED on glass substrates by using the amorphous ZITO anode. OLED fabricated on amorphous ZITO-coated glasses have exhibited good characteristics comparable to OLED on ITO films. Besides OLED, the amorphous ZITO TCO can be applied for other optoelectronic devices like electronic paper, thin film photovoltaic, and smart window.

Keywords

sputteringtransparent conductorcombinatorial synthesis
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1425: Symposium UU – Combinatorial and High-Throughput Methods in Materials Science , 2012 , mrsf11-1425-uu01-04
Copyright
Copyright © Materials Research Society 2012

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