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Characterization of the Structure of Carbon Material Through the sp3/sp2 Bonding Ratio Measurements

Published online by Cambridge University Press:  25 February 2011

F. Demichelis ,
C. De Martino ,
C.F. Pirri  and
A. Tagliaferro
F. Demichelis
Affiliation:
Dipartimento di Fisica Politecnico, Torino, (Italy)
C. De Martino
Affiliation:
Dipartimento di Fisica Politecnico, Torino, (Italy)
C.F. Pirri
Affiliation:
Dipartimento di Fisica Politecnico, Torino, (Italy)
A. Tagliaferro
Affiliation:
Dipartimento di Fisica Politecnico, Torino, (Italy)
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Abstract

Hydrogenated amorphous carbon (a-C:H) films have been deposited by sputter assisted plasma chemical vapor deposition (CVD). The relative concentration of sp3 and sp2 hybridized carbon in samples is determined by infrared (IR) and nuclear magnetic resonance (NMR) spectroscopies and by a new method through the complex dielectric constant deduced from optical transmittance and reflectance. The results are compared and discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 270: Symposium M – Novel Forms of Carbon , 1992 , 487
Copyright
Copyright © Materials Research Society 1992

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References

REFERENCES

[1]. Angus, J.C. and Hayman, C.C., Science 244, 913 (1980), and reference therein.Google Scholar
[2]. Kaplan, S., Jansen, F. and Machonkin, M., Appl. Phys. Lett. 47, 750 (1985).CrossRefGoogle Scholar
[3]. Grill, A., Meyerson, B.S., Patel, V.V, Reimer, J.A. and Petrich, M.A., J. Appl. Phys. 61, 2874 (1987).CrossRefGoogle Scholar
[4]. Tamor, M.A., Vassell, W.C. and Carduner, K.R., Appl. Phys. Lett. 58, 592 (1991)CrossRefGoogle Scholar
[5]. Fink, J., Muller, T., Heinz, H., Pfluger, J., Scheerer, B., Dischler, B., Koidl, P., Bubenzer, A. and Sah, R.E., Phys. Rev. B 30, 4713 (1984).CrossRefGoogle Scholar
[6]. Wang, Y., Chen, H., Hoffman, R.W., Angus, J.C., J. Mater. Res. 1, 2378 (1990).CrossRefGoogle Scholar
[7]. Dischler, B., Bubenzer, A. and Koidl, P., Solid State Commun. 48, 105 (1983).CrossRefGoogle Scholar
[8]. Savvides, N., J. Appl. Phys. 59, 4133 (1986).CrossRefGoogle Scholar
[9]. Demichelis, F., Pirri, C.F. and Tagliaferro, A., Phys. Rev. B (in press).Google Scholar
[10]. Demichelis, F., Kaniadakis, G., Tagliaferro, A. and Tresso, E., Appl. Opt. 26, 1737 (1987).CrossRefGoogle Scholar
[11]. DasGupta, D., Demichelis, F., Pirri, C.F. and Tagliaferro, A., Phys. Rev. B, 43, 2131 (1991).CrossRefGoogle Scholar
[12]. Savvides, N., in Amorphous Hydrogenated Carbon Films, edited by Koidl, P. and Oelhafen, P., , E.M.R.S. (Les Editions de Physique, Paris,1987) vol.17, p.275.Google Scholar