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Characterization of the Depositing Flux in Laser Ablation Deposition (LAD).

Published online by Cambridge University Press:  28 February 2011

Jacques C.S. Kools  and
Jan Dieleman
Jacques C.S. Kools
Affiliation:
Philips Research Labs. P.O. Box 80.000 5600 JA Eindhoven, The Netherlands
Jan Dieleman
Affiliation:
Philips Research Labs. P.O. Box 80.000 5600 JA Eindhoven, The Netherlands
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Abstract

Angular-resolved time-of-flight (ARTOF) studies have been performed on ablation plumes of copper generated by excimer laser fluences just above threshold in vacuum. Positive ions, Rydberg atoms and ground-state neutrals are observed. Relative concentrations, angular intensity distributions and angular-resolved velocity distributions are measured for ground state neutrals and ions.

Ions have the highest kinetic energies ( 20–80 eV). Their angular distribution is isotropic. Their concentration at the substrate is very low ( ≤ 10−6). Ground state neutrals have lower energies ( ≈ 1 eV). Their intensity and velocity is a strongly decreasing function of the polar angle. Rydberg-atoms have energies in between those of ground-state neutrals and ions. Their angular distribution is also dependent on the polar angle.

The concentration, kinetic energy and angular distribution of the ionised species arc very well explained by a mechanism of thermal ionization and subsequent space-charge induced repulsion. The velocity distributions and angular intensity distributions of the ground-state neutrals are quantitatively predicted by a model for the flow dynamics of pulsed laser generated gas clouds.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 235: Symposium A – Phase Formation and Modification by Beam-Solid Interactions , 1991 , 819
Copyright
Copyright © Materials Research Society 1992

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References

REFERENCES

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