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Characterization of Metallized Plastic MEMS

Published online by Cambridge University Press:  10 February 2011

Charles Chu ,
Mark Bachman ,
Yuh-Min Chiang ,
Fernando Gonzales  and
G. P. Li
Charles Chu
Affiliation:
Department of Electrical and Computer Engineering, University of California at Irvine, Irvine, CA 92697-2625
Mark Bachman
Affiliation:
Department of Electrical and Computer Engineering, University of California at Irvine, Irvine, CA 92697-2625
Yuh-Min Chiang
Affiliation:
Department of Electrical and Computer Engineering, University of California at Irvine, Irvine, CA 92697-2625
Fernando Gonzales
Affiliation:
Department of Electrical and Computer Engineering, University of California at Irvine, Irvine, CA 92697-2625
G. P. Li
Affiliation:
Department of Electrical and Computer Engineering, University of California at Irvine, Irvine, CA 92697-2625
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Abstract

Metallization of plastic devices is of interest to newer non-silicon based MEMS which are being developed for biomedical and other applications. The electrical properties of the metallization will depend, in part, on the material on which they are patterned, and the method of deposition. Of interest are the electrical characterizations during usage which must be studied to allow plastic MEMS designs to proceed wisely. Flexible microdevices may develop open circuits or shorts after excessive bending; joule heating may adversely affect the plastic substrates, leading to failure. We present some experimental studies on electrical characterization of metallized plastics as it relates to various processing conditons and usage scenarios.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 605: Symposium MM – Materials Science of Microelectromechanical Systems Devices II , 1999 , 97
Copyright
Copyright © Materials Research Society 2000

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