Hostname: page-component-5cf477f64f-pw477 Total loading time: 0 Render date: 2025-04-05T08:14:26.855Z Has data issue: false hasContentIssue false
  • English
  • Français

Characterization of Ion-Implanted Aluminum and Iron by Spectroscopic Ellipsometry

Published online by Cambridge University Press:  26 February 2011

J. S. Brodkin ,
W. Franzen ,
R. J. Culbertson  and
J. M. Williams
J. S. Brodkin
Affiliation:
U.S. Army Materials Technology Laboratory, Metals Research Branch, SLCMT-EMM-292, Arsenal Street, Watertown, MA 02172
W. Franzen
Affiliation:
U.S. Army Materials Technology Laboratory, Metals Research Branch, SLCMT-EMM-292, Arsenal Street, Watertown, MA 02172
R. J. Culbertson
Affiliation:
U.S. Army Materials Technology Laboratory, Metals Research Branch, SLCMT-EMM-292, Arsenal Street, Watertown, MA 02172
J. M. Williams
Affiliation:
Oak Ridge National Laboratory, Solid State Division, P.O. Box 2008, Oak Ridge, TN 37831
Get access

Abstract

The change in the optical constants of aluminum alloy and iron samples caused by implantation with nitrogen and chromium ions has been investigated by spectroscopic ellipsometry. The objective is to develop a method for simple, non-destructive characterization of ion-implanted metals.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 201: Symposium A – Surface Chemistry and Beam-Solid Interactions , 1990 , 289
Copyright
Copyright © Materials Research Society 1991

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Woolam, J.A., Snyder, P.G. and Rost, M.C., Mater. Res. Soc. Proc. 93, 203, (1987).Google Scholar
2. Rauschenbach, R., Kolitxch, A. and Richter, E., Thin Sol.Films, 109, 37, (1983).Google Scholar
3. Ohira, S. and Iwaki, M., Nucl. Inst. Meth. Bl9 /20, 162 (1987).Google Scholar
4. Longworth, G. and Hartley, N.E.W., Thin Sol. Films, 49, 95 (1978).Google Scholar
5. Rauschenbach, R. and Hohmuth, K., Cryst. Res. and Tech. 19, 1425 (1984).Google Scholar