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Characterization of Ion-Implanted Aluminum and Iron by Spectroscopic Ellipsometry

Published online by Cambridge University Press:  26 February 2011

J. S. Brodkin ,
W. Franzen ,
R. J. Culbertson  and
J. M. Williams
J. S. Brodkin
Affiliation:
U.S. Army Materials Technology Laboratory, Metals Research Branch, SLCMT-EMM-292, Arsenal Street, Watertown, MA 02172
W. Franzen
Affiliation:
U.S. Army Materials Technology Laboratory, Metals Research Branch, SLCMT-EMM-292, Arsenal Street, Watertown, MA 02172
R. J. Culbertson
Affiliation:
U.S. Army Materials Technology Laboratory, Metals Research Branch, SLCMT-EMM-292, Arsenal Street, Watertown, MA 02172
J. M. Williams
Affiliation:
Oak Ridge National Laboratory, Solid State Division, P.O. Box 2008, Oak Ridge, TN 37831
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Abstract

The change in the optical constants of aluminum alloy and iron samples caused by implantation with nitrogen and chromium ions has been investigated by spectroscopic ellipsometry. The objective is to develop a method for simple, non-destructive characterization of ion-implanted metals.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 201: Symposium A – Surface Chemistry and Beam-Solid Interactions , 1990 , 289
Copyright
Copyright © Materials Research Society 1991

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References

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