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Channel Waveguides and Modulators Fabricated From High Temperature Second Order Nonlinear Optical Polymers

Published online by Cambridge University Press:  16 February 2011

J. T. Kenney
Affiliation:
ROI Technologies, 3452 Cooper Dr., Santa Clara, CA 95051
E. S. Binkley
Affiliation:
ROI Technologies, 3452 Cooper Dr., Santa Clara, CA 95051
A. K-Y. Jen
Affiliation:
EniChem AMerica Inc., 2000 Cornwall Rd., Monmouth Junction, NJ 08852
K. Wong
Affiliation:
EniChem AMerica Inc., 2000 Cornwall Rd., Monmouth Junction, NJ 08852
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Abstract

Buried channel wave guides have been fabricated from thermally stable non linear optical polyimides. The Material system consists of a polyimide cladding and a polyimide based active Material. The buried channel wave guides are fabricated by a trench and fill process. This process was used for the fabrication of active wave guides at process temperatures above 300 °C. Single Mode wave guides, and Mach-Zenhder interferometers, were fabricated with attenuation < 2 dB/cm. Active Mach-Zehnder interferometers with a Vπ phase shift of 50 volts and the low attenuation were fabricated. Thermal aging of the poled active device demonstrated no change in activity after 30 Minutes at 230°C.

Type
Research Article
Copyright
Copyright © Materials Research Society 1994

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References

REFERENCES

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