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CdS/CdTe Solar Cells Made by High-Rate Magnetron Sputtering

Published online by Cambridge University Press:  01 February 2011

Victor Plotnikov  and
Alvin Compaan
Victor Plotnikov
Affiliation:
[email protected], The University of Toledo, Physics and Astronomy, Department of Physics and Astronomy, mail drop 111, The University of Toledo, Toledo, OH, 43606, United States
Alvin Compaan
Affiliation:
[email protected], The University of Toledo, Physics and Astronomy, Toledo, OH, 43606, United States
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Abstract

The dependence of deposition rate of CdTe film on deposition pressure and RF power has been studied. The optimum argon pressure was found to be 5 mTorr while the growth rate as a function of power is slightly superlinear. A deposition rate of 140 nm/min has been achieved which is five times faster than for our conventional deposition conditions. Films were characterized by means of X-ray diffraction (XRD) and Atomic Force Microscopy (AFM). Pressure has been found to have a greater effect on film morphology than magnetron sputter power. Working devices have been made with 2-micron layers of CdTe deposited at different powers and 10 mTorr of argon pressure. The effect of different temperatures of CdCl2 post-deposition treatment on cell performance was studied. Efficiency of 11.8% with a 2-micron CdTe layer deposited at 133 nm/min was achieved.

Keywords

photovoltaicsputteringthin film
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1012: Symposium Y – Thin-Film Compound Semiconductor Photovoltaics-2007 , 2007 , 1012-Y12-28
Copyright
Copyright © Materials Research Society 2007

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