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Bulge Test on Free Standing Gold Thin Films

Published online by Cambridge University Press:  01 February 2011

Yawen Li  and
Michael J. Cima
Yawen Li
Affiliation:
Department of Materials Science and Engineering, MIT, Cambridge, MA 02139
Michael J. Cima
Affiliation:
Department of Materials Science and Engineering, MIT, Cambridge, MA 02139
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Abstract

Bulge test was performed on gold and gold/nitride composite films with in plane sizes ranging from 20 to 200μm. The films were prepared using the microfabrication process of a drug delivery MEMS device, and the bulge test setup was constructed using some of the packaging components of the device. Incremental pressure at 5psi interval was applied to the films, whose deflection was measured using interferometry. The extracted gold film properties from bulge test on either pure gold films or composite films yielded comparable values. The lower modulus (126∼168 GPa) comparing with the bulk gold could be due to the less dense microstructure of the evaporated gold film.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 795: Symposium U – Thin Films - Stresses and Mechanical Properties X , 2003 , U10.3
Copyright
Copyright © Materials Research Society 2004

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References

REFERENCES

1. Hohlfelder, R. J., Doctoral Thesis, Stanford University, (1998).Google Scholar
2. Small, M. K., Doctoral Thesis, Stanford University, (1993).Google Scholar
3. Vlassak, J. J., Doctoral Thesis, Stanford University, (1994).Google Scholar
4. Santini, J. T. Jr, Cima, M. J. and Langer, R., Nature 397, 335–338 (1999).Google Scholar
5. ASM Handbook Vol. 2, ed. Lapman, S., (ASM International, 1990), p. 704.Google Scholar
6. Emery, R.D. and Povirk, G.L., Acta Mater. 51 2079–2087 (2003)Google Scholar
7. Sharpe, W. N. Jr, “Mechanical Properties of MEMS Materials,” The MEMS Handbook, ed. Gad-el-Hak, M. (CRC Press, 2001) pp. 3–1 ∼ 3–33.Google Scholar
8. Hertzberg, R. W., Deformation and Fracture Mechanics of Engineering Materials, John Wiley and Sons, New York, (1989) p. 153 Google Scholar