Hostname: page-component-586b7cd67f-2plfb Total loading time: 0 Render date: 2024-11-28T11:41:43.193Z Has data issue: false hasContentIssue false
  • English
  • Français

Block Copolymer Templating for Formation of Quantum Dots and Lattice Mismatched Semiconductor Structures

Published online by Cambridge University Press:  01 February 2011

Smita Jha ,
Chi-Chun Liu ,
Joo Hyung Park ,
Monika K. Wiedmann ,
T S Kuan ,
Susan E. Babcock ,
Luke J. Mawst ,
Paul Nealey  and
Thomas F. Kuech
Smita Jha
Affiliation:
[email protected], University of Wisconsin-Madison, Department of Chemistry, Madison, Wisconsin, United States
Chi-Chun Liu
Affiliation:
[email protected], University of Wisconsin-Madison, Department of Chemical and Biological Engineering, Madison, Wisconsin, United States
Joo Hyung Park
Affiliation:
[email protected], University of Wisconsin-Madison, Department of Electrical and Computer Engineering, Madison, Wisconsin, United States
Monika K. Wiedmann
Affiliation:
[email protected], University of Wisconsin-Madison, Department of Chemical and Biological Engineering, Madison, Wisconsin, United States
T S Kuan
Affiliation:
[email protected], University at Albany, Department of Physics, Albany, New York, United States
Susan E. Babcock
Affiliation:
[email protected], University of Wisconsin-Madison, Department of Materials Science and Engineering, Madison, Wisconsin, United States
Luke J. Mawst
Affiliation:
[email protected], University of Wisconsin-Madison, Department of Electrical and Computer Engineering, Madison, Wisconsin, United States
Paul Nealey
Affiliation:
[email protected]
Thomas F. Kuech
Affiliation:
[email protected], University of Wisconsin, Chemical Engineering, Madison, Wisconsin, United States
Get access

Abstract

Templated growth for the fabrication of semiconductor nanostructures such as quantum dots and lattice-mismatched structures has been employed in this study. Self assembly of block copolymers (BCP) has been exploited to create a regular array of nanoscale patterns on a substrate to generate the growth template. These patterned templates were used for the selective area growth of pseudomorphic quantum dots, allowing for precise control over the dot size and spatial distribution. Strain relaxation in lattice-mismatched structures grown past the pseudomorphic limit was also studied. Analysis of the grown structures suggests that this approach using block copolymer templating followed by selective growth can be used for defect reduction in lattice-mismatched materials.

Keywords

epitaxydefectsIII-V
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1258: Symposia P/Q/R – Low-Dimensional Functional Nanostructures-Fabrication, Characterization and Applications , 2010 , 1258-Q13-05
Copyright
Copyright © Materials Research Society 2010

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1 Mei, X. Kim, D. Ruda, H.E. and Guo, Q. X. Applied Physics Letters 81, 361 (2002).Google Scholar
2 Liang, J. Luo, H. Beresford, R. and Xu, J. Applied Physics Letters 85, 5974 (2004).Google Scholar
3 Kiravittaya, S. Rastelli, A. and Schmidt, O.G, Applied Physics Letters 87, 243112 (2005).Google Scholar
4 Li, R. R. Dapkus, P.D. Thompson, M.E. Jeong, W. G. Harrison, C. Chaikin, P.M, Register, R.E and Adamson, D.H. Applied Physics Letters 76, 1689 (2000).Google Scholar
5 In, I. La, Y.H. Park, S.M. Nealey, P.F. and Gopalan, P. Langmuir 22, 7855 (2006).Google Scholar
6 Park, J.H. Liu, C. C. Rathi, M.K. Mawst, L.J. Nealey, P.F. and Kuech, T.F. Journal of Nanophotonics 3, 1 (2009).Google Scholar
7 Jha, S. Liu, C. C. Kuan, T.S. Babcock, S.E. Nealey, P.F. Park, J.H. Mawst, L.J. and Kuech, T.F. Applied Physics Letters 95, 062104 (2009).Google Scholar
8 Drucker, J. Physical Review B48, 18203 (1993).Google Scholar
9 Alizadeh, A. Hays, D. Taylor, S.T. Keimel, C. Conway, K.R. Denault, L. Krishnan, K. Watkins, V.H. Neander, R. Brown, J.S. Stintz, A. Krishna, S. Blumin, M. Saveliev, I. Ruda, H.E. Braunstein, E. and Jones, C. Journal of Applied Physics 105, 054305 (2009).Google Scholar