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Beta-SiC Synthesis in a Thermal Argon Plasma Jet Reactor

Published online by Cambridge University Press:  25 February 2011

Peter C. Kong  and
E. Pfender
Peter C. Kong
Affiliation:
Department of Mechanical Engineering, University of Minnesota, Minneapolis, Minnesota 55455.
E. Pfender
Affiliation:
Department of Mechanical Engineering, University of Minnesota, Minneapolis, Minnesota 55455.
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Abstract

Ultrafine beta-SiC powders are synthesized in a thermal argon plasma jet reactor by a reaction between methane and silicon monoxide. High temperatures (>10000 K) and rapid quench rates (>106 K/s) lead to a high degree of super-saturation of the chemical vapor, resulting in homogeneous nucleation of ultrafine SiC particles. The maximum conversion of SiO to SiC determined by thermogravimetric analysis is 97%. Particle size analyses show a bimodal distribution with the majority of the particles falling in a size range from 2 to 40 nm. Larger particles with sizes larger than 80 nm are also observed. Characteristically-shaped SiC single-crystal platelets are observed throughout this work.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 98: Symposium K – Plasma Processing and Synthesis of Materials II , 1987 , 377
Copyright
Copyright © Materials Research Society 1987

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References

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