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Atomic Layer Deposition for the Conformal Coating of Nanoporous Materials

Published online by Cambridge University Press:  15 February 2011

Jeffrey W. Elam ,
Guang Xiong ,
Catherine Y. Han ,
H. Hau Wang ,
James P. Birrell ,
John N. Hryn ,
Michael J. Pellin ,
John F. Poco  and
Joe H. Satcher
Jeffrey W. Elam
Affiliation:
Argonne National Laboratory, Argonne, IL 60439
Guang Xiong
Affiliation:
Argonne National Laboratory, Argonne, IL 60439
Catherine Y. Han
Affiliation:
Argonne National Laboratory, Argonne, IL 60439
H. Hau Wang
Affiliation:
Argonne National Laboratory, Argonne, IL 60439
James P. Birrell
Affiliation:
Argonne National Laboratory, Argonne, IL 60439
John N. Hryn
Affiliation:
Argonne National Laboratory, Argonne, IL 60439
Michael J. Pellin
Affiliation:
Argonne National Laboratory, Argonne, IL 60439
John F. Poco
Affiliation:
Lawrence Livermore National Laboratory, Livermore, CA 94550
Joe H. Satcher
Affiliation:
Lawrence Livermore National Laboratory, Livermore, CA 94550
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Abstract

Atomic layer deposition (ALD) is ideal for applying precise, conformal coatings over nanoporous materials. We have recently used ALD to coat two nanoporous solids: anodic aluminum oxide (AAO) and silica aerogels. AAO possesses hexagonally ordered pores with diameters d∼10 nm and thicknesses L∼70 microns. The AAO membranes were coated by ALD with successive layers of A1203, TiO2 and V2O5 to fabricate catalytic membranes. SEM, TEM and EDAX analysis of the membranes demonstrate that the ALD layers uniformly coat the extremely high aspect ratio (L/d∼104) AAO pores. These catalytic membranes show remarkable selectivity in the oxidative dehydrogenation of cyclohexane. Additional AAO membranes coated with ALD Pd films show promise as hydrogen sensors. Silica aerogels have the lowest density and highest surface area of any solid material. Consequently, these materials serve as an excellent substrate to fabricate novel catalytic materials and gas sensors by ALD. In this study, both thin film and monolithic aerogels were coated by ZnO ALD and the properties of the aerogels were investigated as a function of the coating thickness.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 876: Symposium A – Nanoporous and Nanostructured Materials for Catalysis, Sensor and Gas Separation Applications , 2005 , R12.6
Copyright
Copyright © Materials Research Society 2005

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References

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