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Amorphous Diamond-Like Carbon Films Prepared by Dc Saddle-Field Glow-Discharge Method: Doping with Boron and Phosphorus

Published online by Cambridge University Press:  10 February 2011

W. Chan ,
T. Allen ,
F. Gaspari ,
J. Szurmak ,
E. Sagnes  and
S. Zukotynski
W. Chan
Affiliation:
Department of Electrical and Computer Engineering, University of Toronto, Toronto, Ontario, Canada, M5S 3G4, [email protected]
T. Allen
Affiliation:
Department of Physics, Geology and Astronomy, University of Tennessee at Chattanooga, Chattanooga, TN, 37403, [email protected]
F. Gaspari
Affiliation:
Department of Electrical and Computer Engineering, University of Toronto, Toronto, Ontario, Canada, M5S 3G4, [email protected]
J. Szurmak
Affiliation:
Department of Electrical and Computer Engineering, University of Toronto, Toronto, Ontario, Canada, M5S 3G4, [email protected]
E. Sagnes
Affiliation:
Department of Electrical and Computer Engineering, University of Toronto, Toronto, Ontario, Canada, M5S 3G4, [email protected]
S. Zukotynski
Affiliation:
Department of Electrical and Computer Engineering, University of Toronto, Toronto, Ontario, Canada, M5S 3G4, [email protected]
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Abstract

Our preliminary results show that controllable doping of amorphous hydrogenated DLC films prepared by DC saddle-field glow-discharge technique is possible. We have found deposition conditions when the doping with boron is electrically effective.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 498: Symposium AA – Covalently Bonded Disordered Thin-Film Materials , 1997 , 165
Copyright
Copyright © Materials Research Society 1998

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References

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