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X-Ray Texture Analysis of Oriented PZT Thin Films

Published online by Cambridge University Press:  10 February 2011

C. R. Peterson ,
N. W. Medendorp Jr. ,
E. B. Slamovich  and
K. J. Bowman
C. R. Peterson
Affiliation:
School of Materials Engineering, Purdue University, West Lafayette, IN 47907
N. W. Medendorp Jr.
Affiliation:
School of Materials Engineering, Purdue University, West Lafayette, IN 47907
E. B. Slamovich
Affiliation:
School of Materials Engineering, Purdue University, West Lafayette, IN 47907
K. J. Bowman
Affiliation:
School of Materials Engineering, Purdue University, West Lafayette, IN 47907
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Abstract

PZT thin films with the composition Pb(Zr0.6Ti0 4)O3 were processed via metallo-organic decomposition (MOD) with {111} and {100} orientations. Ferroelectric measurements showed that the {111} and {100} oriented films had remanent polarizations of 19.5 μC/cm2 and 16 μC/cm2, respectively. Both x-ray pole figure analysis and the Harris texture index were used to quantify the degree of {100}, {110}, and {111} orientation in each film, with reasonable agreement between the two methods. The {100} oriented thin film was determined to be 582 times random for the Harris technique versus 522 times random for pole figure analysis, while the {111} oriented film was 41 times random for the Harris technique and 81 times random for pole figure analysis. The axisymmetric texture of the films allow 2-D pole figure analysis to provide a quantitative characterization of film texture.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 433: Symposium T – Ferroelectric Thin Films V , 1996 , 297
Copyright
Copyright © Materials Research Society 1996

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