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Wet Oxidation of Poly-Si1-xGex Layer Grown on SiO2/Si
Published online by Cambridge University Press: 10 February 2011
Abstract
In this paper, we report on the experiment results of wet oxidation of Si1-xGex on SiO2. AES and XPS measurements were performed to study the effect of the oxidation on the Si1-xGex layer. A possible mechanism was proposed.
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- Research Article
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- Copyright © Materials Research Society 1997