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Top-down Fabricated Polysilicon Nanoribbon Biosensor Chips for Cancer Diagnosis

Published online by Cambridge University Press:  03 June 2013

Hsiao-Kang Chang ,
Xiaoli Wang ,
Noppadol Aroonyadet ,
Rui Zhang ,
Yan Song ,
Ram Datar ,
Richard Cote ,
Mark Thompson  and
Chongwu Zhou
Hsiao-Kang Chang
Affiliation:
Department of Electrical Engineering, University of Southern California, Los Angeles, CA 90089, U.S.A.
Xiaoli Wang
Affiliation:
Department of Electrical Engineering, University of Southern California, Los Angeles, CA 90089, U.S.A.
Noppadol Aroonyadet
Affiliation:
Department of Electrical Engineering, University of Southern California, Los Angeles, CA 90089, U.S.A.
Rui Zhang
Affiliation:
Department of Chemistry, University of Southern California, Los Angeles, CA 90089, U.S.A.
Yan Song
Affiliation:
Department of Chemistry, University of Southern California, Los Angeles, CA 90089, U.S.A.
Ram Datar
Affiliation:
Department of Pathology, University of Miami, Miami, Florida 33136, U.S.A.
Richard Cote
Affiliation:
Department of Pathology, University of Miami, Miami, Florida 33136, U.S.A.
Mark Thompson
Affiliation:
Department of Chemistry, University of Southern California, Los Angeles, CA 90089, U.S.A.
Chongwu Zhou
Affiliation:
Department of Electrical Engineering, University of Southern California, Los Angeles, CA 90089, U.S.A.
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Abstract

Nanobiosensors have drawn significant research interest in recent years owing to the advantages of label-free, electrical detection. However, nanobiosensors fabricated by bottom-up process are limited in terms of yield and device uniformity due to the challenges in assembly. Nanobiosensors fabricated by top-down process, on the other hand, exhibit better uniformity but require time and costly processes and materials to achieve the critical dimensions required for high sensitivity. In this report, we introduce a top-down nanobiosensor based on polysilicon nanoribbon. The polysilicon nanoribbon devices can be fabricated by conventional photolithography with only materials and equipments used in the standard CMOS process, thus resulting in great time and cost efficiency, as well as scalability. The devices show great response to pH changes with a wide dynamic range and high sensitivity. Biomarker detection is also demonstrated with clinically relevant sensitivity. Such results suggest that polysilicon nanoribbon devices exhibit great potential toward a highly efficient, reliable and sensitive biosensing platform.

Keywords

sensornanostructurebiomedical
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1569: Symposium MM – Advanced Materials for Biological and Biomedical Applications , 2013 , pp. 213 - 218
Copyright
Copyright © Materials Research Society 2013 

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References

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