Hostname: page-component-745bb68f8f-v2bm5 Total loading time: 0 Render date: 2025-01-12T09:33:29.703Z Has data issue: false hasContentIssue false
  • English
  • Français

Thin Films of Diamond-Like Carbon

Published online by Cambridge University Press:  22 February 2011

David B. Kerwin ,
Bruno Daudin ,
Michel Dubus ,
J. Fontenille ,
Raymond S. Robinson  and
Ian L. Spain
David B. Kerwin
Affiliation:
Dept. of Physics, Colorado State Univ., Ft. Collins, CO 80523, U.S.A. Now with MOSTEK, Garden of the Gods Road, Colorado Springs, CO
Bruno Daudin
Affiliation:
Laboratoire des Accelerateurs, Centre d'Etudes Nucleaires, Grenoble 38, France
Michel Dubus
Affiliation:
Laboratoire des Accelerateurs, Centre d'Etudes Nucleaires, Grenoble 38, France
J. Fontenille
Affiliation:
Dept. de Recherche Fondamentale de Grenoble, Centre d'Etudes Nucleaires, Grenoble 38, France
Raymond S. Robinson
Affiliation:
Dept. of Physics, Colorado State Univ., Ft. Collins, CO 80523, U.S.A.
Ian L. Spain
Affiliation:
Dept. of Physics, Colorado State Univ., Ft. Collins, CO 80523, U.S.A.
Get access

Abstract

Thin films of hard, diamond-like, carbon have been deposited on glass, silicon and sapphire substrates using three different ion beam deposition techniques: (a) ion beam sputter-deposition from a graphite target, (b) sputter-deposition with simultaneous bombardment of the growing film using a second ion beam, (c) primary ion deposition using a beam extracted from an Ar-hydrocarbon plasma. Structural, mechanical optical and electrical properties were measured. It was found that the hydrogen content controlled the internal (compressive) stress and that relatively stress-free films contained ,∼ 30 atomic % H (average). The H content could be correlated with the H/C arrival ratio from the gas phase. Optical absorption and luminescence measurements gave a band gap of '∼, 1 ev with band-tailing. Resistivity measurements and their temperature dependence fitted variable range hopping models. Hardnesses were ≿ 7 Mohs. The properties of the films were consistent with a mixture of sp3 and sp2 bonds in an amorphous, hydrogenated structure.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 47: Symposium C – Thin Films: The Relationship of Structure to Properties , 1985 , 195
Copyright
Copyright © Materials Research Society 1985

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Aisenberg, S. and Chabot, R., J. Appl. Phys. 42, 29543 (1971).Google Scholar
2. A useful collection of papers on different preparation methods, with references to earlier work can be found in Bendow, B., ed., Proceedings of the DARPA Workshop on Diamond-Like Carbon Coatings (Albuquerque, NM, 1982).Google Scholar
3. Weissmantel, C., Reisse, G., Erler, H. J., Henny, F., Bewilogua, K., Ebersbach, U. and Schurer, C., Thin Solid Films 63, 315 (1979).CrossRefGoogle Scholar
4. Banks, B. A. and Rutledge, S. K., J. Vac. Sci. and Tech. 21, 807 (1982).Google Scholar
5. Kahn, A. A., Mathine, D., Woollam, J. A., Chung, Y., Phys. Rev. B 28, 7229 (1983).Google Scholar
6. Ligeon, E. and Guivarc'h, A., Radiation Effects 22, 101 (1974).Google Scholar
7. Rossnagel, S. M., Gilstrap, P., Rujkorakarn, R., J. Vac. Sci. Technol. 21, 1045 (1982).Google Scholar
8. Myerson, B. and Smith, F. W., J. Non Cryst. Solids 35, 435 (1980) and Sol. State Comm. 34, 531 (1980).Google Scholar
9. Bubenzer, A., Dischler, B., Brandt, G., Koidl, P., J. Appl. Phys. 54, 4590 (1983).Google Scholar
10. Fink, J., Muller-Heinzerling, T., PflUger, J., Bubenzer, A., Koidl, P., Crecelius, G., Sol. St. Comm. 47, 687 (1983).Google Scholar
11. Dillon, R. O., Woollam, J. A., Katkanant, V., Phys. Rev. B 29, 3482 (1984).Google Scholar