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Thermal Properties of Thin Films

Published online by Cambridge University Press:  22 February 2011

J. C. Lambropoulos  and
S.-S. Hwang
J. C. Lambropoulos
Affiliation:
Department of Mechanical Engineering, University of Rochester, Rochester, NY 14627 Laboratory for Laser Energetics, University of Rochester, Rochester, NY 14627
S.-S. Hwang
Affiliation:
Department of Mechanical Engineering, University of Rochester, Rochester, NY 14627
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Abstract

We summarize various measurements of the thermal conductivity of thin ceramic films which show that the thermal conductivity of thin films with thickness in the micron and sub-micron range may be up to two orders of magnitude lower than the thermal conductivityof the corresponding bulk solid. The reduction in the thin film effective thermal conductivity is attributed to the interfacial thermal resistance across the film/substrate interface.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 284: Symposium G – Amorphous Insulating Thin Films , 1992 , 133
Copyright
Copyright © Materials Research Society 1993

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References

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